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公开(公告)号：US20070114432A1
公开(公告)日：2007-05-24
申请号：US11258212
申请日：2005-10-26
IPC分类号： H01J3/14
CPC分类号： H01J33/02 , A61L2/087 , H01J2237/244
摘要： A detector is disclosed for sensing an intensity of an electron beam generated along a path. An exemplary detector includes an exposed conductor attached to a support which is configured to locate the exposed conductor within a path of an electron beam; a grounded conductor isolated from the exposed conductor, the grounded conductor partly surrounding the exposed conductor to form a plasma shield having a window positioned at least in a direction of the electron beam path.
摘要翻译： 公开了一种用于感测沿着路径产生的电子束的强度的检测器。 示例性检测器包括附接到支撑件的暴露导体，其被配置为将暴露的导体定位在电子束的路径内; 与暴露的导体隔离的接地导体，接地导体部分围绕暴露的导体以形成具有至少位于电子束路径的方向上的窗口的等离子体屏蔽。
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公开(公告)号：US20070090303A1
公开(公告)日：2007-04-26
申请号：US11258215
申请日：2005-10-26
IPC分类号： H01J33/02 , H01J37/244
CPC分类号： G01R19/0061
摘要： A detector and method are disclosed for sensing an intensity of an electron beam. An exemplary detector includes a multilayer composite structure having a conductive core, an insulating layer formed on the conductive core, and an outer conductive layer electrically connected to a voltage potential and formed on the insulating layer. A support is configured to locate the conductive core in alignment with an electron beam generator, between an electron beam generator and a target area, and within a direct path of an electron beam to be generated by the electron beam generator.
摘要翻译： 公开了用于感测电子束强度的检测器和方法。 一种示例性检测器包括具有导电芯的多层复合结构，形成在导电芯上的绝缘层，以及电连接到电压电位并形成在绝缘层上的外导电层。 支撑件被配置成将导电芯与电子束发生器，电子束发生器和目标区域之间以及由电子束发生器产生的电子束的直接路径内的定位。
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