专利检索 ap:("Andrej S Mitrovic" OR "Maolin Long" OR "Paul Moroz" OR "Steven T Fink" OR "William D Jones") AND inv:"William D Jones" 第 1 页

1.

发明授权
Plasma chamber wall segment temperature control 失效

公开(公告)号：US07186313B2

公开(公告)日：2007-03-06

申请号：US10765445

申请日：2004-01-28

申请人： Andrej S Mitrovic , Maolin Long , Paul Moroz , Steven T Fink , William D Jones

发明人： Andrej S Mitrovic , Maolin Long , Paul Moroz , Steven T Fink , William D Jones

IPC分类号： H01L21/306

CPC分类号： H01L21/67248 , G05D23/1934 , H01J37/32522 , H01L21/67069 , H01L21/67109

摘要： A device and method for controlling the temperature of a plasma chamber inside wall or other surfaces exposed to the plasma by a plurality of temperature control systems. A plasma process within the plasma chamber can be controlled by independently controlling the temperature of segments of the wall or other surfaces.