公开(公告)号：US20220014853A1

公开(公告)日：2022-01-13

申请号：US17177178

申请日：2021-02-16

Applicant: Apple Inc.

Inventor： Gokhan HATIPOGLU ,  Onur I. ILLKORUR ,  Pablo Seoane VIEITES ,  Christopher WILK ,  Peter C. HRUDEY

IPC: H04R7/14 ,  H04R19/02 ,  B81B3/00

Abstract: Aspects of the subject technology relate to electronic devices having speakers such as microelectromechanical systems (MEMS) speakers. A MEMS speaker can include an electrostatically driven, corrugated MEMS structure to move air without a magnet, coil, or traditional speaker membrane, and thus provide a low-power, compact speaker with a large acoustically active area in a small volume. Neighboring folds in the corrugated MEMS structure may form pairs of MEMS electrodes that can be pushed together and/or pulled apart to deform the MEMS structure in a breathing motion that generates pressure differentials on opposing sides of the corrugated MEMS structure to generate sound. Additional modes of operation are described.