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公开(公告)号:USD1037778S1
公开(公告)日:2024-08-06
申请号:US29846787
申请日:2022-07-19
Applicant: Applied Materials, Inc.
Designer: Ashutosh Agarwal , Eric J. Hoffmann , Dhritiman Subha Kashyap , Kartik Shah , Amit Rajendra Sherekar , Sanjeev Baluja
Abstract: FIG. 1 is a top-front isometric view of our new design for a gas distribution plate;
FIG. 2 is a top-rear isometric view of the gas distribution plate of FIG. 1;
FIG. 3 is a front view of the gas distribution plate of FIG. 1;
FIG. 4 is a rear view of the gas distribution plate of FIG. 1;
FIG. 5 is a left side view of the gas distribution plate of FIG. 1;
FIG. 6 is a right side view of the gas distribution plate of FIG. 1;
FIG. 7 is a top view of the gas distribution plate of FIG. 1; and,
FIG. 8 is a bottom view of the gas distribution plate of FIG. 1.
The portions of the gas distribution plate shown in broken line form no part of the claimed design.-
2.
公开(公告)号:US20220312553A1
公开(公告)日:2022-09-29
申请号:US17214340
申请日:2021-03-26
Applicant: Applied Materials, Inc.
Inventor: Dhritiman Subha Kashyap , Amit Rajendra Sherekar , Kartik Shah , Ashutosh Agarwal , Eric J. Hoffmann , Sanjeev Baluja , Vijay D. Parkhe
IPC: H05B1/02
Abstract: A heater assembly having a backside purge gap formed between a top plate and a heater of the heater assembly, the top plate having a top plate wall. The top plate wall having an upper portion, a middle portion and a lower portion, the middle portion forming an incline relative to the top portion.
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3.
公开(公告)号:US11818810B2
公开(公告)日:2023-11-14
申请号:US17214340
申请日:2021-03-26
Applicant: Applied Materials, Inc.
Inventor: Dhritiman Subha Kashyap , Amit Rajendra Sherekar , Kartik Shah , Ashutosh Agarwal , Eric J. Hoffmann , Sanjeev Baluja , Vijay D. Parkhe
CPC classification number: H05B1/0233 , H01L21/67103
Abstract: A heater assembly having a backside purge gap formed between a top plate and a heater of the heater assembly, the top plate having a top plate wall. The top plate wall having an upper portion, a middle portion and a lower portion, the middle portion forming an incline relative to the top portion.
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