公开(公告)号：US11236834B2

公开(公告)日：2022-02-01

申请号：US16297542

申请日：2019-03-08

Applicant: Applied Materials, Inc.

Inventor： Kenneth Le ,  Balarabe Mohammed ,  Sohrab Zokaei ,  Ming Xu

IPC: F16K7/14 ,  F16K31/06 ,  F16K31/122

Abstract: A diaphragm valve includes an inlet port, an outlet port, and a valve seat proximate one of the inlet port or the outlet port. A diaphragm is positioned relative to the valve seat and has an open state wherein the diaphragm is spaced from the valve seat to enable a fluid path between the inlet port and the outlet port. The diaphragm has a closed state wherein the diaphragm is seated on the valve seat to block the fluid path. A coupling member is coupled between the diaphragm and a reciprocatable member and configured to maintain the diaphragm in the open state while the reciprocatable member is in the opened position. The coupling member may have a clearance gap relative to the reciprocatable member when the reciprocatable member is in the closed position. Other diaphragm valves and methods of operating diaphragm valves are also disclosed.

公开(公告)号：US20200284360A1

公开(公告)日：2020-09-10

申请号：US16297542

申请日：2019-03-08

Applicant: Applied Materials, Inc.

Inventor： Kenneth Le ,  Balarabe Mohammed ,  Sohrab Zokaei ,  Ming Xu

IPC: F16K7/14

Abstract: A diaphragm valve includes an inlet port, an outlet port, and a valve seat proximate one of the inlet port or the outlet port. A diaphragm is positioned relative to the valve seat and has an open state wherein the diaphragm is spaced from the valve seat to enable a fluid path between the inlet port and the outlet port. The diaphragm has a closed state wherein the diaphragm is seated on the valve seat to block the fluid path. A coupling member is coupled between the diaphragm and a reciprocatable member and configured to maintain the diaphragm in the open state while the reciprocatable member is in the opened position. The coupling member may have a clearance gap relative to the reciprocatable member when the reciprocatable member is in the closed position. Other diaphragm valves and methods of operating diaphragm valves are also disclosed.