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公开(公告)号：US20250125183A1
公开(公告)日：2025-04-17
申请号：US18380004
申请日：2023-10-13
Applicant: Applied Materials, Inc.
IPC: H01L21/687 , H01L21/67 , H05B3/00
Abstract: Apparatus and methods for cooling down a susceptor assembly are described. A heat exchange passage in a susceptor assembly thermal break transfers heat from processing gases that flow through the susceptor assembly to a cooling jacket and cools down the susceptor assembly and associated hardware.
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