公开(公告)号：US20250114908A1

公开(公告)日：2025-04-10

申请号：US18483070

申请日：2023-10-09

Applicant: Applied Materials, Inc.

Inventor： Nai-Chieh Huang ,  Akshay Aravindan ,  Shih-Haur Shen ,  Jianshe Tang ,  Jay Gurusamy ,  Chen-Wei Chang ,  Chih-Han Yang ,  Wei Lu

IPC: B24B53/017

Abstract: A system may include a gimbal defining a plurality of pockets, where each pocket may include a first portion and a second portion that extends between the first portion and a base of the pocket. The second portion may have a greater diameter than the first portion. The system may include a plurality of conditioning disks, where each conditioning disk is seated within the first portion of a respective pocket. The system may include a plurality of gaskets, where each gasket is seated within the second portion of a respective pocket. The system may include a plurality o-rings, each o-ring disposed between a peripheral edge of one of the plurality of conditioning disks and a lateral wall of one of the plurality of pockets. The system may include a plurality of shoulder screws for coupling the gimbal with one of the plurality of gaskets and a conditioning disk.