公开(公告)号：US20180269089A1

公开(公告)日：2018-09-20

申请号：US15461952

申请日：2017-03-17

Applicant: Applied Materials, Inc.

Inventor： Niraj MERCHANT ,  Lara HAWRYLCHAK ,  Mehran BEHDJAT ,  Dietrich GAGE ,  Christopher DAO ,  Binh NGUYEN ,  Michael P. KAMP ,  Mahesh RAMAKRISHNA

IPC: H01L21/67 ,  G01J5/34 ,  G01J5/00 ,  G01R35/00 ,  H05B1/02 ,  H05B3/00 ,  H01L21/66

Abstract: Embodiments of the disclosure relate to methods for measuring temperature and a tool for calibrating temperature control of a substrate support in a processing chamber without contact with a surface of the substrate support. In one embodiment, a test fixture with a temperature sensor is removably mounted to an upper surface of a chamber body of the processing chamber such that the temperature sensor has a field of view including an area of the substrate support that is adjacent to a resistive coil disposed in the substrate support. One or more calibration temperature measurements of the area of the substrate support are taken by the temperature sensor and simultaneously one or more calibration resistance measurements of the resistive coil are taken corresponding to each calibration temperature measurement. Temperature control of a heating element disposed in the substrate support is calibrated based on the calibration temperature and calibration resistance measurements.