公开(公告)号：US20250076216A1

公开(公告)日：2025-03-06

申请号：US18799653

申请日：2024-08-09

Applicant: Applied Materials, Inc.

Inventor： Venkatakaushik VOLETI ,  Yun-Ching CHANG ,  Dan XIE ,  Gregory KIRK ,  Mehdi VAEZ-IRAVANI

IPC: G01N21/95 ,  G01N21/47 ,  H01L21/66 ,  H01L23/00

Abstract: An optical inspection system for pre-bonding inspection includes a stage having a surface on which a sample to be inspected is placed, the surface of the sample having at least parts with a two dimensional (2D) periodic pattern which may include defects, an optical head including optics, a dark-field illuminator configured to illuminate the surface of the sample at an first angle, wherein the first angle is an oblique angle, a bright-field illuminator configured to illuminate the surface at a second angle, a dark-field collection path, a bright-field collection path, and a sensor configured to detect light transmitted from the dark-field illuminator, scattered at the surface of the sample, collected by the optical head, and relayed through the dark-field collection path, and light transmitted from the bright-field illuminator, reflected at the surface of the sample, and relayed through the bright-field collection path.