公开(公告)号：US20220190306A1

公开(公告)日：2022-06-16

申请号：US17543360

申请日：2021-12-06

Applicant: Applied Materials, Inc.

Inventor： David Masayuki ISHIKAWA ,  Girish Kumar GOPALAKRISHNAN NAIR ,  Ezhiylmurugan RANGASAMY ,  David ALVAREZ ,  Kent Qiujing ZHAO

IPC: H01M4/04 ,  H01M10/0525 ,  H01M4/66 ,  H01M4/38 ,  G01B11/30 ,  G01B7/06

Abstract: Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.

公开(公告)号：US20240387792A1

公开(公告)日：2024-11-21

申请号：US18785521

申请日：2024-07-26

Applicant: Applied Materials, Inc.

Inventor： David Masayuki ISHIKAWA ,  Girish Kumar GOPALAKRISHNAN NAIR ,  Ezhiylmurugan RANGASAMY ,  David ALVAREZ ,  Kent Qiujing ZHAO

IPC: H01M4/04 ,  G01B7/06 ,  G01B11/30 ,  G01N21/84 ,  H01M4/38 ,  H01M4/66 ,  H01M10/0525

Abstract: Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.