公开(公告)号：US20240347688A1

公开(公告)日：2024-10-17

申请号：US18751967

申请日：2024-06-24

Applicant: Applied Materials, Inc.

Inventor： Subramanya P. HERLE ,  Girish Kumar GOPALAKRISHNAN NAIR ,  Daniel STOCK ,  Sambhu Nath KUNDU ,  Ezhiylmurugan RANGASAMY

IPC: H01M4/04 ,  B05D3/04 ,  B05D3/14 ,  B05D5/12 ,  H01M4/1395 ,  H01M4/38

CPC classification number: H01M4/0492 ,  H01M4/0404 ,  H01M4/1395 ,  H01M4/382 ,  B05D3/044 ,  B05D3/142 ,  B05D5/12

Abstract: A method and apparatus for fabricating electrodes used in energy storage devices are provided. In some implementations a surface of the electrode is activated for (a) a pre-treatment process to remove loosely held particles from the electrode surface; (b) a pre-treatment process to activate the surface of the electrode material for improved bonding or wetting for subsequently deposited materials; (c) a post-treatment of the pre-lithiation layer to improve subsequent bonding with additionally deposited layer, for example, passivation layers; and/or (d) a post-treatment of the pre-lithiation layer to improve/accelerate absorption of the lithium into the underlying electrode material.

公开(公告)号：US20230137506A1

公开(公告)日：2023-05-04

申请号：US17442415

申请日：2021-08-16

Applicant: Applied Materials, Inc.

Inventor： Thomas DEPPISCH ,  Ezhiylmurugan RANGASAMY ,  Stefan BANGERT ,  Mathew Dean ALLISON

IPC: C23C14/56 ,  C23C14/50 ,  C23C14/54 ,  C23C14/16

Abstract: A processing system for processing a flexible substrate is described. The processing system includes a vacuum chamber having a wall with an opening for the flexible substrate, a substrate support for supporting the flexible substrate during transportation of the flexible substrate through the opening, and a measurement assembly for measuring at least one of a property of the flexible substrate and a property of one or more coatings on the flexible substrate. The measurement assembly and the substrate support are attached to the wall.

公开(公告)号：US20220352520A1

公开(公告)日：2022-11-03

申请号：US17863106

申请日：2022-07-12

Applicant: Applied Materials, Inc.

Inventor： Ezhiylmurugan RANGASAMY ,  Subramanya P. HERLE

IPC: H01M4/62 ,  H01M4/04 ,  H01M4/38 ,  H01M4/36 ,  H01M4/66 ,  H01M4/1395 ,  H01M4/134 ,  H01M10/0525 ,  H01M10/0562

Abstract: Interfacial films, which are both electronic conducting and ion conducting, for anode films are provided. The one or more protective films described herein may be mixed conduction materials, which are both electronic conducting and ion-conducting. The one or more protective films described herein may include materials selected from lithium transition metal dichalcogenides, Li9Ti5O12, or a combination thereof. The lithium transition metal dichalcogenide includes a transition metal dichalcogenide having the formula MX2, wherein M is selected from Ti, Mo, or W and X is selected from S, Se, or Te. The transition metal dichalcogenide may be selected from TiS2, MoS2, WS2, or a combination thereof. The lithium transition metal dichalcogenide may be selected from lithium-titanium-disulfide (e.g., LiTiS2), lithium-tungsten-disulfide (e.g., LiWS2), lithium-molybdenum-disulfide (e.g., LiMoS2), or a combination thereof.

公开(公告)号：US20230197922A1

公开(公告)日：2023-06-22

申请号：US17987477

申请日：2022-11-15

Applicant: Applied Materials, Inc.

Inventor： Sonal ,  David Masayuki ISHIKAWA ,  Sumedh Dattatraya ACHARYA ,  Ezhiylmurugan RANGASAMY ,  Subramanya P. HERLE

IPC: H01M4/04 ,  H01M10/0525 ,  H01M4/38 ,  H01M4/583

CPC classification number: H01M4/0419 ,  H01M4/38 ,  H01M4/583 ,  H01M10/0525 ,  H01M2004/027

Abstract: Embodiments of the present disclosure generally relate to electrode coatings and methods of coating electrodes. In an embodiment, a method of depositing a structure on a lithium ion battery (LIB) anode is provided. The method includes accelerating particles in a working gas through a convergent-divergent nozzle to a process velocity that is from a critical velocity of the particles to an erosion velocity of the LIB anode, the particles comprising a metal and/or a Group III-VI element; heating or cooling the particles in the working gas at a softening temperature; ejecting the particles in the working gas from a nozzle outlet of the convergent-divergent nozzle, the particles ejected at the process velocity, wherein at least a portion of the particles are in solid phase when ejected from the convergent-divergent nozzle; and depositing a first structure on the LIB anode, the first structure comprising the metal and/or the Group III-VI element.

公开(公告)号：US20220181601A1

公开(公告)日：2022-06-09

申请号：US17543322

申请日：2021-12-06

Applicant: Applied Materials, Inc.

Inventor： Alejandro SEVILLA ,  Ezhiylmurugan RANGASAMY ,  Subramanya P. HERLE ,  David Masayuki ISHIKAWA

IPC: H01M4/04

Abstract: A method and system for forming lithium anode devices are provided. In one embodiment, the methods and systems form pre-lithiated Group-IV alloy-type nanoparticles (NP's), for example, Li—Z where Z is Ge, Si, or Sn. In another embodiment, the methods and systems synthesize Group-IV nanoparticles and alloy the Group-IV nanoparticles with lithium. The Group-IV nanoparticles can be made on demand and premixed with anode materials or coated on anode materials. In yet another embodiment, the methods and systems form lithium metal-free silver carbon (“Ag—C”) nanocomposites (NC's). In yet another embodiment, a method utilizing silver (PVD) and carbon (PECVD) co-deposition to make anode coatings that can regulate lithium nucleation energy to minimize dendrite formation is provided.

公开(公告)号：US20220158159A1

公开(公告)日：2022-05-19

申请号：US17455113

申请日：2021-11-16

Applicant: Applied Materials, Inc.

Inventor： David Masayuki ISHIKAWA ,  Ezhiylmurugan RANGASAMY ,  Kiran VACHHANI ,  Subramanya P. HERLE ,  Girish Kumar GOPALAKRISHNAN NAIR

IPC: H01M4/04 ,  H01M4/1393 ,  H01M4/1395 ,  H01M4/62 ,  H01M4/36 ,  C23C14/58 ,  C23C14/34 ,  C23C14/56 ,  C23C16/54 ,  C23C16/56 ,  H01M4/38 ,  H01M4/587 ,  C23C14/08 ,  C23C14/06 ,  C23C14/14 ,  C23C14/12 ,  C23C14/10 ,  C23C14/30

Abstract: Methods, systems, and apparatuses for coating flexible substrates are provided. A coating system includes an unwinding module housing a feed reel capable of providing a continuous sheet of flexible material, a winding module housing a take-up reel capable of storing the continuous sheet of flexible material, and a processing module arranged downstream from the unwinding module. The processing module includes a plurality of sub-chambers arranged in sequence, each configured to perform one or more processing operations to the continuous sheet of flexible material. The processing module includes a coating drum capable of guiding the continuous sheet of flexible material past the plurality of sub-chambers along a travel direction. The sub-chambers are radially disposed about the coating drum and at least one of the sub-chambers includes a deposition module. The deposition module includes a pair of electron beam sources positioned side-by-side along a transverse direction perpendicular to the travel direction.

公开(公告)号：US20240387792A1

公开(公告)日：2024-11-21

申请号：US18785521

申请日：2024-07-26

Applicant: Applied Materials, Inc.

Inventor： David Masayuki ISHIKAWA ,  Girish Kumar GOPALAKRISHNAN NAIR ,  Ezhiylmurugan RANGASAMY ,  David ALVAREZ ,  Kent Qiujing ZHAO

IPC: H01M4/04 ,  G01B7/06 ,  G01B11/30 ,  G01N21/84 ,  H01M4/38 ,  H01M4/66 ,  H01M10/0525

Abstract: Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.

公开(公告)号：US20220056576A1

公开(公告)日：2022-02-24

申请号：US17403273

申请日：2021-09-17

Applicant: Applied Materials, Inc.

Inventor： Thomas DEPPISCH ,  Ezhiylmurugan RANGASAMY ,  Stefan BANGERT ,  Mathew Dean ALLISON

IPC: C23C14/56 ,  H05K1/03 ,  H05K1/11

Abstract: A processing system for processing a flexible substrate is described. The processing system includes a vacuum chamber having a wall with an opening for the flexible substrate, a substrate support for supporting the flexible substrate during transportation of the flexible substrate through the opening, and a measurement assembly for measuring at least one of a property of the flexible substrate and a property of one or more coatings on the flexible substrate. The measurement assembly and the substrate support are attached to the wall.

公开(公告)号：US20220190306A1

公开(公告)日：2022-06-16

申请号：US17543360

申请日：2021-12-06

Applicant: Applied Materials, Inc.

Inventor： David Masayuki ISHIKAWA ,  Girish Kumar GOPALAKRISHNAN NAIR ,  Ezhiylmurugan RANGASAMY ,  David ALVAREZ ,  Kent Qiujing ZHAO

IPC: H01M4/04 ,  H01M10/0525 ,  H01M4/66 ,  H01M4/38 ,  G01B11/30 ,  G01B7/06

Abstract: Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.