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公开(公告)号：US20250102072A1
公开(公告)日：2025-03-27
申请号：US18372804
申请日：2023-09-26
Applicant: Applied Materials, Inc.
Inventor： David Ishikawa , Sumedh Dattatraya Acharya , Arun Nagarajan , Ming Xu
Abstract: Certain embodiments of the present disclosure relate to a fluid flow valve. The fluid flow valve includes a housing configured to receive a flow of fluid. The fluid flow valve further includes a first valve portion configured to proportionally control the flow of fluid through the housing. The fluid flow valve further includes a second valve portion in series with the first valve portion along a fluid flow path within the housing. The second valve portion is configured to actuate between an open position to permit the flow of fluid and a closed position to stop the flow of fluid.
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