公开(公告)号：US20220228616A1

公开(公告)日：2022-07-21

申请号：US17229998

申请日：2021-04-14

Applicant: Applied Materials, Inc.

Inventor： Hassan Yousefi ,  Ganesh Babu Chandrasekaran ,  Robin L. Tiner ,  Jianhua Zhou ,  Isami Iguchi

IPC: F16B19/02 ,  F16B5/02

Abstract: A mask frame support unit includes a case, a protruding body extending below the case, and a station having a flat head disposed above the case. The protruding body includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the case and comprising a second end having a second diameter opposite the first end. The second diameter is less than the first diameter, and the tapered region is coupled to the cylindrical region at the second end. The case houses a number of components including an upper receiving plate in contact with the station, a lower receiving plate disposed underneath the upper receiving plate, a flat head unit movement support mechanism disposed between the lower receiving plate and the body, and a centering component.

公开(公告)号：US12140168B2

公开(公告)日：2024-11-12

申请号：US17229998

申请日：2021-04-14

Applicant: Applied Materials, Inc.

Inventor： Hassan Yousefi ,  Ganesh Babu Chandrasekaran ,  Robin L. Tiner ,  Jianhua Zhou ,  Isami Iguchi

IPC: B23Q3/18 ,  F16B19/02

Abstract: A mask frame support unit includes a case, a protruding body extending below the case, and a station having a flat head disposed above the case. The protruding body includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the case and comprising a second end having a second diameter opposite the first end. The second diameter is less than the first diameter, and the tapered region is coupled to the cylindrical region at the second end. The case houses a number of components including an upper receiving plate in contact with the station, a lower receiving plate disposed underneath the upper receiving plate, a flat head unit movement support mechanism disposed between the lower receiving plate and the body, and a centering component.