公开(公告)号：US20230306281A1

公开(公告)日：2023-09-28

申请号：US17668280

申请日：2022-02-09

Applicant: Applied Materials, Inc.

Inventor： Pengyu Han ,  Hong-Rui Chen ,  Shu-Yu Chen ,  Wan-Hsueh Lai ,  Pin Ham Lu ,  Zhengping Yao

IPC: G06N5/02 ,  G05B13/02

CPC classification number: G06N5/022 ,  G05B13/029

Abstract: A method includes determining that conditions of a processing chamber have changed since a trained machine learning model associated with the processing chamber was trained. The method further includes determining whether a change in the conditions of the processing chamber is a gradual change or a sudden change. Responsive to determining that the change in the conditions of the processing chamber is a gradual change, the method further includes performing a first training process to generate a new machine learning model. Responsive to determining that the change in the conditions of the processing chamber is a sudden change, the method further includes performing a second training process to generate the new machine learning model. The first training process is different from the second training process.