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公开(公告)号：US12066639B2
公开(公告)日：2024-08-20
申请号：US18214871
申请日：2023-06-27
Applicant: Applied Materials, Inc.
Inventor： Pengyu Han , John Anthony O'Malley , Michael N. Grimbergen , Lei Lian , Upendra Ummethala , Michael Kutney
CPC classification number: G02B27/30 , G02B9/12 , G02B27/005
Abstract: Implementations disclosed describe a collimator assembly having a collimator housing that includes an interface configured to optically couple to a process chamber that has a target surface, and a port to receive an optical fiber to deliver, to an enclosure formed by the collimator housing, a first (second) plurality of spectral components of light belonging to a first (second) range of wavelengths, and an achromatic lens located, at least partially, within the enclosure formed by the collimator housing, the achromatic lens to direct the first (second) plurality of spectral components of light onto the target surface to illuminate a first (second) region on the target surface, wherein the second region is substantially the same as the first region.
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公开(公告)号：US20230342016A1
公开(公告)日：2023-10-26
申请号：US17728021
申请日：2022-04-25
Applicant: Applied Materials, Inc.
Inventor： Jui-Che Lin , Yan-Jhu Chen , Chao-Hsien Lee , Shauh-Teh Juang , Pengyu Han , Wallace Wang
IPC: G06F3/04847 , G06F3/0481 , H01L21/02
CPC classification number: G06F3/04847 , G06F3/0481 , H01L21/02104
Abstract: An electronic device manufacturing system configured to receive, by a processor, input data reflecting a feature related to a manufacturing process of a substrate. The manufacturing system is further configured to train a machine-learning model based on the input data reflecting the feature. The manufacturing system is further configured to modify the machine-learning model in view of the virtual knob for the feature.
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公开(公告)号：US20230341699A1
公开(公告)日：2023-10-26
申请号：US18214871
申请日：2023-06-27
Applicant: Applied Materials, Inc.
Inventor： Pengyu Han , John John O’Malley , Michael N. Grimbergen , Lei Lian , Upendra Ummethala , Michael Kutney
CPC classification number: G02B27/30 , G02B9/12 , G02B27/005
Abstract: Implementations disclosed describe a collimator assembly having a collimator housing that includes an interface configured to optically couple to a process chamber that has a target surface, and a port to receive an optical fiber to deliver, to an enclosure formed by the collimator housing, a first (second) plurality of spectral components of light belonging to a first (second) range of wavelengths, and an achromatic lens located, at least partially, within the enclosure formed by the collimator housing, the achromatic lens to direct the first (second) plurality of spectral components of light onto the target surface to illuminate a first (second) region on the target surface, wherein the second region is substantially the same as the first region.
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公开(公告)号：US20230306281A1
公开(公告)日：2023-09-28
申请号：US17668280
申请日：2022-02-09
Applicant: Applied Materials, Inc.
Inventor： Pengyu Han , Hong-Rui Chen , Shu-Yu Chen , Wan-Hsueh Lai , Pin Ham Lu , Zhengping Yao
CPC classification number: G06N5/022 , G05B13/029
Abstract: A method includes determining that conditions of a processing chamber have changed since a trained machine learning model associated with the processing chamber was trained. The method further includes determining whether a change in the conditions of the processing chamber is a gradual change or a sudden change. Responsive to determining that the change in the conditions of the processing chamber is a gradual change, the method further includes performing a first training process to generate a new machine learning model. Responsive to determining that the change in the conditions of the processing chamber is a sudden change, the method further includes performing a second training process to generate the new machine learning model. The first training process is different from the second training process.
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5.发明公开公开(公告)号：US20230163002A1
公开(公告)日：2023-05-25
申请号：US17534446
申请日：2021-11-23
Applicant: Applied Materials, Inc.
Inventor： Pengyu Han
IPC: H01L21/67 , G05B13/02 , G05B19/418
CPC classification number: H01L21/67276 , G05B13/0265 , G05B19/41875 , G05B2219/32368
Abstract: A method for determining processing chamber conditions using sensor data and a machine learning model is provided. The method includes receiving, by a processing device, sensor data that include chamber data indicating a state of an environment of a processing chamber processing a substrate according to a set of process parameters of a current process. The sensor data further include spectral data indicating optical emission spectra (OES) measurements of a plasma disposed within the processing chamber. The method further includes using the sensor data as input to a machine learning model and obtaining one or more outputs that indicate one or more chamber condition metrics. The method further includes determining a recovery status of a processing chamber based on the one or more chamber condition metrics. The method further includes causing a modification to a performance of the processing chamber based on the recovery status of the processing chamber.
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Patent Agency Ranking
公开(公告)号：US20220397515A1
公开(公告)日：2022-12-15
申请号：US17344788
申请日：2021-06-10
Applicant: APPLIED MATERIALS, INC.
Inventor： Pengyu Han , Lei Lian , Shu Yu Chen , Todd Egan , Wan Hsueh Lai , Chao-Hsien Lee , Pin Ham Lu , Zhengping Yao , Barry Craver
Abstract: A machine learning model trained to provide metrology measurements for a substrate is provided. Training data generated for a prior substrate processed according to a prior process is provided to train the model. The training data includes a training input including a subset of historical spectral data extracted from a normalized set of historical spectral data collected for the prior substrate during the prior process. The subset of historical spectral data includes an indication of historical spectral features associated with a particular type of metrology measurement. The training data also includes a training output including a historical metrology measurement obtained for the prior substrate, the historical metrology measurement associated with the particular type of metrology measurement. Spectral data is collected for a current substrate processed according to a current process. A subset of current data extracted from a normalized set of the spectral data for the current substrate is provided as input to the trained model. Metrology measurement data for the current substrate is extracted from one or more outputs of the trained model.
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公开(公告)号：US20250022733A1
公开(公告)日：2025-01-16
申请号：US18896633
申请日：2024-09-25
Applicant: APPLIED MATERIALS, INC.
Inventor： Pengyu Han
IPC: H01L21/67 , G05B13/02 , G05B19/418
Abstract: A method for determining processing chamber conditions using sensor data and a machine learning model is provided. The method includes receiving, by a processing device, sensor data that include chamber data indicating a state of an environment of a processing chamber processing a substrate according to a set of process parameters of a current process. The sensor data further include spectral data indicating optical emission spectra (OES) measurements of a plasma disposed within the processing chamber. The method further includes using the sensor data as input to a machine learning model and obtaining one or more outputs that indicate one or more chamber condition metrics. The method further includes determining a recovery status of a processing chamber based on the one or more chamber condition metrics. The method further includes causing a modification to a performance of the processing chamber based on the recovery status of the processing chamber.
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公开(公告)号：US11965798B2
公开(公告)日：2024-04-23
申请号：US17344791
申请日：2021-06-10
Applicant: APPLIED MATERIALS, INC.
Inventor： Pengyu Han , Lei Lian
CPC classification number: G01M11/0207 , G01B11/0683 , G02B6/04 , G02B6/136 , G02B27/0025 , G02B27/30 , G03F7/70625
Abstract: An endpoint detection system for enhanced spectral data collection is provided. An optical bundle is coupled to a light source configured to generate incident light. The optical bundle includes two or more sets of optical fibers that each include an emitting optical fiber and a receiving optical fiber. The receiving optical fibers are disposed within the optical bundle at a pairing angle relative to a respective emitting optical fiber. The optical bundle is also coupled to a collimator assembly that includes an achromatic lens. The achromatic lens receives a first light beam of incident light from a first emitting optical fiber and directs spectral components of the first light beam to a first and second portion of a surface of a substrate. The first portion of the substrate surface is substantially the same as the second portion. The achromatic lens collects reflected spectral components that are produced by the spectral components directed to the first and second portions of the substrate surface. The achromatic lens transmits the reflected spectral components to a first receiving fiber of the optical fiber bundle, which transmits the reflected spectral components to a light detection component. A processing device coupled to the light detection component determines a reflectance of the substrate surface based on the reflected spectral components.
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公开(公告)号：US20220397482A1
公开(公告)日：2022-12-15
申请号：US17344791
申请日：2021-06-10
Applicant: APPLIED MATERIALS, INC.
Inventor： Pengyu Han , Lei Lian
Abstract: An endpoint detection system for enhanced spectral data collection is provided. An optical bundle is coupled to a light source configured to generate incident light. The optical bundle includes two or more sets of optical fibers that each include an emitting optical fiber and a receiving optical fiber. The receiving optical fibers are disposed within the optical bundle at a pairing angle relative to a respective emitting optical fiber. The optical bundle is also coupled to a collimator assembly that includes an achromatic lens. The achromatic lens receives a first light beam of incident light from a first emitting optical fiber and directs spectral components of the first light beam to a first and second portion of a surface of a substrate. The first portion of the substrate surface is substantially the same as the second portion. The achromatic lens collects reflected spectral components that are produced by the spectral components directed to the first and second portions of the substrate surface. The achromatic lens transmits the reflected spectral components to a first receiving fiber of the optical fiber bundle, which transmits the reflected spectral components to a light detection component. A processing device coupled to the light detection component determines a reflectance of the substrate surface based on the reflected spectral components.
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公开(公告)号：US11421977B2
公开(公告)日：2022-08-23
申请号：US16165544
申请日：2018-10-19
Applicant: Applied Materials, Inc.
Inventor： Lei Lian , Pengyu Han
IPC: G01B9/02056 , G01B11/06 , H01L21/67 , H01J37/32
Abstract: A method is disclosed for operating an endpoint detection system of a processing chamber having a ceiling formed therein, a substrate support located internal to the processing chamber, and a substrate resting on the substrate support. A transparent panel is located in the ceiling of the processing chamber, the panel oriented at a first acute angle relative to the substrate and the substrate support. The transparent panel receives an incident light beam from the endpoint detection system at a second acute angle relative to the panel. The transparent panel transmits the incident light beam to the substrate within the processing chamber at an angle perpendicular to the substrate and the substrate support.
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