公开(公告)号：US12292693B2

公开(公告)日：2025-05-06

申请号：US18415430

申请日：2024-01-17

Applicant: Applied Materials, Inc.

Inventor： Chung-Shin Kang ,  Jun Yang ,  Hongbin Ji

IPC: G03F7/00

Abstract: In embodiments of a digital lithography system, physical design data prepared at a data prep server in a hierarchical data structure. A leaf node comprises a repeater nod, comprising a bitmap image and a plurality of locations at which the bitmap appears in a physical design. At an EYE server, a repeater node bitmap is adjusted based upon, for example, spatial light modulator rotational adjustment and substrate distortion. The adjusted repeater node and the plurality of locations in which the adjusted repeater appears is compared to the repeater of the data prep server and its plurality of locations. In further embodiments, a rasterizer generates a checksum of bitmap to be printed to a substrate, from the EYE server bitmap. The checksum is compared to a checksum of the EYE server bitmap.

公开(公告)号：US11914305B2

公开(公告)日：2024-02-27

申请号：US17792667

申请日：2020-02-18

Applicant: Applied Materials, Inc.

Inventor： Chung-Shin Kang ,  Jun Yang ,  Hongbin Ji

IPC: G03F7/00

CPC classification number: G03F7/70508 ,  G03F7/704 ,  G03F7/70291

Abstract: In embodiments of a digital lithography system, physical design data prepared at a data prep server in a hierarchical data structure. A leaf node comprises a repeater nod, comprising a bitmap image and a plurality of locations at which the bitmap appears in a physical design. At an EYE server, a repeater node bitmap is adjusted based upon, for example, spatial light modulator rotational adjustment and substrate distortion. The adjusted repeater node and the plurality of locations in which the adjusted repeater appears is compared to the repeater of the data prep server and its plurality of locations. In further embodiments, a rasterizer generates a checksum of bitmap to be printed to a substrate, from the EYE server bitmap. The checksum is compared to a checksum of the EYE server bitmap.