公开(公告)号：US20230112114A1

公开(公告)日：2023-04-13

申请号：US17953575

申请日：2022-09-27

Applicant: Applied Materials, Inc.

Inventor： Joseph R. Johnson ,  Yang Ming Lee ,  Hsiao-Ying Cheng ,  Christabelle Si Mei Goh ,  Ustun Serdar Tulu ,  Chang H. Choi ,  Chloe Kim

IPC: G01N1/34 ,  G01N1/44 ,  G01N21/64

Abstract: Exemplary sample processing methods are described that include providing an initial sample to a sample processing system. The sample processing system includes a light-emitting-diode, a temperature control unit, and a fluid supply unit. The methods also include irradiating the initial sample with light emitted from the light-emitting-diode to produce an irradiated sample. The methods may still further include adjusting a temperature of the irradiated sample with the temperature control unit to between 0° C. and 60° C., and contacting the irradiated sample with a fluid from the fluid supply unit. The irradiated sample has a reduction in auto-fluorescence of greater than or about 50% compared to the initial sample. Exemplary sample processing systems are also described that include a light-emitting-diode, a temperature control unit, and a fluid supply unit.