公开(公告)号：US20030202092A1

公开(公告)日：2003-10-30

申请号：US10387267

申请日：2003-03-11

申请人： Applied Materials, Inc.

发明人： Iraj Sadighi ,  Jeff Hudgens ,  Michael Rice ,  Gary Wyka

IPC分类号： H04N007/18 ,  H04N009/47

CPC分类号： H01L21/67259 ,  B25J9/1692 ,  B25J9/1697 ,  G05B2219/45031 ,  H01L21/681

摘要： A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.