公开(公告)号：US20200335329A1

公开(公告)日：2020-10-22

申请号：US16388543

申请日：2019-04-18

Applicant: Applied Materials, Inc.

Inventor： Jeffery W. Anthis ,  Nicolas Louis Gabriel Breil ,  David Thompson ,  Feng Q. Liu ,  Liqi Wu

IPC: H01L21/02

Abstract: Exemplary methods of forming nickel-containing materials may include forming a layer of a nickel-and-oxygen-containing material overlying a substrate. The nickel-and-oxygen-containing material may be characterized by a carbon content. The methods may also include annealing the nickel-containing material with a carbon-containing precursor at a temperature greater than or about 100° C. The carbon content within the nickel-and-oxygen-containing material may be maintained during the annealing.