公开(公告)号：US11359286B2

公开(公告)日：2022-06-14

申请号：US16864877

申请日：2020-05-01

Applicant: Applied Materials, Inc.

Inventor： Jereld Winkler ,  Mohith Verghese

IPC: H01L21/00 ,  C23C16/52 ,  C23C16/455 ,  H01L21/02 ,  H01L21/66 ,  C23C16/44

Abstract: Describe is a quartz crystal microbalance (QCM) device mounted within a heated sample chamber. The sample chamber temperature is maintained about 10° C. to about 30° C. greater than the temperature of the precursor vessel. The sample chamber is connected to the precursor delivery line and includes a high temperature valve and a flow pathway to foreline with a high temperature valve to permit removal of excess material. The QCM device includes a heater and gas cooling channel allowing the device to be maintained at a temperature about 10° C. to about 30° C. less than the temperature of the precursor vessel.

公开(公告)号：US20210340674A1

公开(公告)日：2021-11-04

申请号：US16864877

申请日：2020-05-01

Applicant: Applied Materials, Inc.

Inventor： Jereld Winkler ,  Mohith Verghese

IPC: C23C16/52 ,  C23C16/455 ,  C23C16/44 ,  H01L21/66 ,  H01L21/02

Abstract: Describe is a quartz crystal microbalance (QCM) device mounted within a heated sample chamber. The sample chamber temperature is maintained about 10° C. to about 30° C. greater than the temperature of the precursor vessel. The sample chamber is connected to the precursor delivery line and includes a high temperature valve and a flow pathway to foreline with a high temperature valve to permit removal of excess material. The QCM device includes a heater and gas cooling channel allowing the device to be maintained at a temperature about 10° C. to about 30° C. less than the temperature of the precursor vessel.