公开(公告)号：US12211195B2

公开(公告)日：2025-01-28

申请号：US17949937

申请日：2022-09-21

Applicant: Applied Materials, Inc.

Inventor： Yash Chhabra ,  Abyaya Dhar ,  Joseph Liu ,  Yi Nung Wu ,  Boon Sen Chan ,  Sidda Reddy Kurakula ,  Chandrasekhar Roy

IPC: G06T7/00 ,  G01N21/95

Abstract: The present disclosure includes edge defect detection via image analytics. A method includes identifying an image of an edge of a susceptor pocket formed by a susceptor of a substrate processing system. The method further includes predicting, based on the image, whether property values of the edge of the susceptor meet threshold values. The method further includes, responsive to the property values of the edge meeting threshold values, causing performance of a corrective action associated with the susceptor.

公开(公告)号：US20240095899A1

公开(公告)日：2024-03-21

申请号：US17949937

申请日：2022-09-21

Applicant: Applied Materials, Inc.

Inventor： Yash Chhabra ,  Abyaya Dhar ,  Joseph Liu ,  Yi Nung Wu ,  Boon Sen Chan ,  Sidda Reddy Kurakula ,  Chandrasekhar Roy

IPC: G06T7/00 ,  G01N21/95

CPC classification number: G06T7/0004 ,  G01N21/9501 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: The present disclosure includes edge defect detection via image analytics. A method includes identifying an image of an edge of a susceptor pocket formed by a susceptor of a substrate processing system. The method further includes predicting, based on the image, whether property values of the edge of the susceptor meet threshold values. The method further includes, responsive to the property values of the edge meeting threshold values, causing performance of a corrective action associated with the susceptor.

公开(公告)号：US20250045900A1

公开(公告)日：2025-02-06

申请号：US18922194

申请日：2024-10-21

Applicant: Applied Materials, Inc.

Inventor： Yash Chhabra ,  Abyaya Dhar ,  Joseph Liu ,  Yi Nung Wu ,  Boon Sen Chan ,  Sidda Reddy Kurakula ,  Chandrasekhar Roy

IPC: G06T7/00 ,  G01N21/95

Abstract: A method includes identifying one or more images of an edge of a susceptor pocket formed in an upper surface of a susceptor of a substrate processing system. An angle identification component is disposed in the susceptor pocket. The method further includes causing, based on the one or more images, performance of an action associated with the susceptor.