公开(公告)号：US20240360549A1

公开(公告)日：2024-10-31

申请号：US18140179

申请日：2023-04-27

申请人： Applied Materials, Inc.

发明人： Feng Q. Liu ,  Byunghoon Yoon ,  Joung-Joo Lee ,  Avgerinos V. Gelatos ,  Mark J. Saly

IPC分类号： C23C16/34 ,  C23C16/455 ,  H01L21/768 ,  H01L23/532

CPC分类号： C23C16/34 ,  C23C16/45527 ,  H01L21/76844 ,  H01L23/53209 ,  H01L23/53238 ,  H01L23/53266 ,  H01L23/5226

摘要： A method includes performing a reactant step of a deposition cycle of a deposition process to form a molybdenum (Mo)-based material, performing a Mo precursor step of the deposition cycle, and performing a treatment step of the deposition cycle. Performing the reactant step includes introducing a reactant, performing the Mo precursor step includes introducing a Mo precursor, and performing the treatment step includes introducing a treatment gas. The deposition process is performed at a temperature that is less than or equal to about 450° C.