专利检索 ap:("Applied Materials, Inc.") AND inv:"Jyothi RAJEEVAN" 第 1 页

1.

发明公开
METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A CALIBRATION OPERATION FOR A PLURALITY OF MASS FLOW CONTROLLERS (MFCS) OF A SUBSTRATE PROCESSING SYSTEM 审中-公开

公开(公告)号：US20230366715A1

公开(公告)日：2023-11-16

申请号：US18223977

申请日：2023-07-19

申请人： Applied Materials, Inc.

发明人： Bindusagar MARATH SANKARATHODI , Zhiyuan YE , Jyothi RAJEEVAN , Ala MORADIAN , Zuoming ZHU , Errol Antonio C. SANCHEZ , Patricia M. LIU

IPC分类号： G01F15/00 , G01F25/17

CPC分类号： G01F15/002 , G01F25/17

摘要： Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.

2.

发明申请
METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A CALIBRATION OPERATION FOR A PLURALITY OF MASS FLOW CONTROLLERS (MFCS) OF A SUBSTRATE PROCESSING SYSTEM 有权

公开(公告)号：US20220326061A1

公开(公告)日：2022-10-13

申请号：US17229737

申请日：2021-04-13

申请人： Applied Materials, Inc.

发明人： Bindusagar MARATH SANKARATHODI , Zhiyuan YE , Jyothi RAJEEVAN , Ala MORADIAN , Zuoming ZHU , Errol Antonio C. SANCHEZ , Patricia M. LIU

IPC分类号： G01F15/00 , G01F25/00

摘要： Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.