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公开(公告)号：US11604089B2
公开(公告)日：2023-03-14
申请号：US17247091
申请日：2020-11-30
发明人： Zhiyuan Ye , Justin Hough , Marcel E. Josephson
IPC分类号： G01F25/17 , G01F1/36 , G05D7/06 , G05B23/02 , G01F1/50 , G01F1/38 , G01F25/10 , G01F1/42 , H01L21/67
摘要： An electronic device manufacturing system includes: a gas supply; a mass flow controller (MFC) coupled to the gas supply; an inlet coupled to the MFC; an outlet; a control volume serially coupled to the inlet to receive a gas flow; and a flow restrictor serially coupled to the control volume and the outlet. A controller is adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. A process chamber is coupled to a flow path, which is coupled to the mass flow controller, the process chamber to receive one or more process chemistries via the mass flow controller.
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公开(公告)号：US11520358B2
公开(公告)日：2022-12-06
申请号：US17521469
申请日：2021-11-08
发明人： Michael Rice , Joseph AuBuchon , Sanjeev Baluja , Ashley M. Okada , Alexander Fernandez , Ming Xu , Marcel E. Josephson , Sushant Suresh Koshti , Kenneth Le , Kevin M. Brashear
摘要： Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A regulator is positioned at an upstream end of a shared volume having a plurality of downstream ends. A flow controller is positioned at each downstream end of the shared volume, the flow controller comprising an orifice and a fast pulsing valve. Methods of using the gas distribution apparatus and calibrating the flow controllers are also described.
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公开(公告)号：US11740118B2
公开(公告)日：2023-08-29
申请号：US18069264
申请日：2022-12-21
发明人： Glen Davis
CPC分类号： G01F25/17 , G01F15/005 , G01N29/222 , G01N2291/02836
摘要： Provided are systems and methods for line volume calibration, and measurement of fluid samples delivered to an interrogation point. In various embodiments, a known fluid volume comprising a sample line fluid and a secondary fluid is delivered to a fluid boundary sensor. The fluid boundary sensor assists in determining the position of the boundaries between the various fluids, and the positions of these boundaries are used to determine the sample line fluid volume.
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公开(公告)号：US11733081B2
公开(公告)日：2023-08-22
申请号：US17229737
申请日：2021-04-13
发明人： Bindusagar Marath Sankarathodi , Zhiyuan Ye , Jyothi Rajeevan , Ala Moradian , Zuoming Zhu , Errol Antonio C. Sanchez , Patricia M. Liu
CPC分类号： G01F15/002 , G01F25/17
摘要： Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.
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公开(公告)号：US11598664B2
公开(公告)日：2023-03-07
申请号：US16621784
申请日：2018-08-28
申请人： BAYER HEALTHCARE LLC
发明人： Michael McDermott , Chelsea Marsh , Michael Spohn , William Barone , Robert Praniewicz , Edden Rabin , Corey Savannah , Vince Delbrugge
摘要： A calibration system for calibrating a pressure output of a fluid injector having a housing configured for connecting to the fluid injector; a drive member engagement portion configured for contacting a drive member of the fluid injector; a compressible member, which may have a known modulus of compression, connected at its proximal end to the drive member engagement portion, wherein the compressible member is compressed with movement of the drive member of the fluid injector between a first, uncompressed position and a second, at least partially compressed position of the fluid injector in a distal direction; and a sensor connected to the compressible member is described. The sensor is configured for measuring at least one of a force imparted by the drive member and a displacement of the drive member when the compressible member is in the second, at least partially compressed position. The system may generate a calibration curve for the drive member of the fluid injector and allow the generation of a fault condition. Methods for calibrating a fluid injector are also described.
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公开(公告)号：US11912561B2
公开(公告)日：2024-02-27
申请号：US17133020
申请日：2020-12-23
发明人： Prem Swaroop , Atish Kamble , Bodhayan Dev
摘要： In one aspect, fuel inventory data characterizing a level of fuel stored at a fuel storage facility can be received from a sensor in operable communication with the fuel storage facility. Flow meter data characterizing an amount of fuel dispensed from the fuel storage facility by a fuel dispenser nozzle can be received from a flow meter in fluid communication with the fuel dispenser nozzle and the fuel storage facility. Fuel transaction data characterizing the dispensing of fuel by the fuel dispenser nozzle and the dispensing of the fuel by one or more additional fuel dispenser nozzles in fluid communication with the fuel storage facility can be received. An estimate of meter drift characterizing a change in calibration of the flow meter can be determined based on the fuel inventory data, the flow meter data, and the fuel transaction data. The estimate of meter drift can be provided.
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公开(公告)号：US20230119629A1
公开(公告)日：2023-04-20
申请号：US18069264
申请日：2022-12-21
发明人： Glen Davis
摘要： Provided are systems and methods for line volume calibration, and measurement of fluid samples delivered to an interrogation point. In various embodiments, a known fluid volume comprising a sample line fluid and a secondary fluid is delivered to a fluid boundary sensor. The fluid boundary sensor assists in determining the position of the boundaries between the various fluids, and the positions of these boundaries are used to determine the sample line fluid volume.
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公开(公告)号：US11573118B2
公开(公告)日：2023-02-07
申请号：US16892502
申请日：2020-06-04
发明人： Glen Davis
摘要： Provided are systems and methods for line volume calibration, and measurement of fluid samples delivered to an interrogation point. In various embodiments, a known fluid volume comprising a sample line fluid and a secondary fluid is delivered to a fluid boundary sensor. The fluid boundary sensor assists in determining the position of the boundaries between the various fluids, and the positions of these boundaries are used to determine the sample line fluid volume.
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公开(公告)号：US20230366715A1
公开(公告)日：2023-11-16
申请号：US18223977
申请日：2023-07-19
发明人： Bindusagar MARATH SANKARATHODI , Zhiyuan YE , Jyothi RAJEEVAN , Ala MORADIAN , Zuoming ZHU , Errol Antonio C. SANCHEZ , Patricia M. LIU
CPC分类号： G01F15/002 , G01F25/17
摘要： Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.
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公开(公告)号：US20230358594A1
公开(公告)日：2023-11-09
申请号：US18351562
申请日：2023-07-13
发明人： Glen Davis
CPC分类号： G01F25/17 , G01F15/005 , G01N29/222 , G01N2291/02836
摘要： Provided are systems and methods for line volume calibration, and measurement of fluid samples delivered to an interrogation point. In various embodiments, a known fluid volume comprising a sample line fluid and a secondary fluid is delivered to a fluid boundary sensor. The fluid boundary sensor assists in determining the position of the boundaries between the various fluids, and the positions of these boundaries are used to determine the sample line fluid volume.
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