公开(公告)号：US20200025292A1

公开(公告)日：2020-01-23

申请号：US16517299

申请日：2019-07-19

Applicant: Applied Materials, Inc.

Inventor： Shagun P. MAHESHWARI ,  Yao-Hung YANG ,  King F. LEE ,  Andrew YU ,  Aniruddha PAL ,  Tom K. CHO ,  Chien-Min LIAO

IPC: F16J15/02

Abstract: A sealing member is provided, including a plurality of nodes and a plurality of antinodes. Each sealing member can be rotated to expose non-damaged lobes for sealing, and prevents the sealing member from falling out of the lobed groove. A chamber is provided, including a groove that the sealing member is placed in. A method of rotating and placing the sealing member is provided, including a rotation to expose nondamaged portions of the sealing member.