公开(公告)号：US20240410773A1

公开(公告)日：2024-12-12

申请号：US18208010

申请日：2023-06-09

Applicant: Applied Materials, Inc.

Inventor： Chih-Yang CHANG ,  Shantanu Rajiv GADGIL ,  Chien-Min LIAO ,  Shannon WANG ,  Yao-Hung YANG ,  Tom K. CHO

IPC: G01L13/06 ,  C23C16/455 ,  C23C16/52 ,  G01M13/005

Abstract: Methods and apparatus provide in-situ pressure sensors for apparatus used in semiconductor manufacturing processes. In some embodiments, the apparatus may comprise a showerhead body, a first gas channel of the showerhead body, a second gas channel of the showerhead body, one or more first gas pressure sensors positioned on a surface of the first gas channel, and one or more second gas pressure sensors positioned on a surface of the second gas channel. The apparatus may be formed by additive manufacturing including the pressure sensors and electrical connections to the pressure sensors. In some embodiments, a controller may be utilized to control semiconductor processes based on the pressure readings from the in-situ pressure sensors.

公开(公告)号：US20220275505A1

公开(公告)日：2022-09-01

申请号：US17187218

申请日：2021-02-26

Applicant: Applied Materials, Inc.

Inventor： Chien-Min LIAO ,  Chi-Feng LIU ,  Yi Nung WU ,  Hsiu YANG ,  Yixing LIN ,  Boon Sen CHAN ,  Siamak SALIMIAN

IPC: C23C16/44 ,  H05B1/02 ,  C23C16/455

Abstract: Methods and apparatus for a baking chamber for processing a chamber component are provided herein. In some embodiments, a baking chamber includes: an enclosure defining a first chamber, wherein the first chamber comprises: a first chamber body having a first floor and first sidewalls that couple the first floor to a first lid of the first chamber body to define a first interior volume; a first support disposed in the first interior volume; a first gas line disposed in the first interior volume proximate the first lid; a first showerhead disposed between the first gas line and the first support; a first exhaust coupled to the first floor; and a first heater disposed in the first interior volume between the first support and the first floor; and wherein the enclosure includes a door configured to facilitate transferring the chamber component into and out of the enclosure.

公开(公告)号：US20210168979A1

公开(公告)日：2021-06-03

申请号：US16702031

申请日：2019-12-03

Applicant: Applied Materials, Inc.

Inventor： Hsui YANG ,  Yao-Hung YANG ,  Jeevan SHANBHAG ,  Chien-Min LIAO ,  Earl HUNTER ,  David GANON ,  Mariana LUIGI ,  Siamak SALIMIAN ,  Tom K. CHO ,  Chun-Chung CHEN

IPC: H05K13/08 ,  H01L21/67

Abstract: The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.

公开(公告)号：US20220020565A1

公开(公告)日：2022-01-20

申请号：US16933922

申请日：2020-07-20

Applicant: Applied Materials, Inc.

Inventor： Chien-Min LIAO ,  Yao-Hung YANG ,  Tom K. CHO ,  Siamak SALIMIAN ,  Hsiu YANG ,  Chun-Chung CHEN

IPC: H01J37/32

Abstract: Certain embodiments provide a method and non-transitory computer readable medium comprising instructions that, when executed by a processor of a processing system, cause the processing system to perform a method for improving operation of a semiconductor processing system. The method of part life estimation generally includes obtaining a chamber part having a first surface portion and second surface portion. A data matrix in the first portion of the chamber part is read. The data matrix has raised features. The first portion of the chamber part is cleaned. Wear on the raised features is evaluated. The part is discarded in response to the wear on the raised feature.

公开(公告)号：US20200025292A1

公开(公告)日：2020-01-23

申请号：US16517299

申请日：2019-07-19

Applicant: Applied Materials, Inc.

Inventor： Shagun P. MAHESHWARI ,  Yao-Hung YANG ,  King F. LEE ,  Andrew YU ,  Aniruddha PAL ,  Tom K. CHO ,  Chien-Min LIAO

IPC: F16J15/02

Abstract: A sealing member is provided, including a plurality of nodes and a plurality of antinodes. Each sealing member can be rotated to expose non-damaged lobes for sealing, and prevents the sealing member from falling out of the lobed groove. A chamber is provided, including a groove that the sealing member is placed in. A method of rotating and placing the sealing member is provided, including a rotation to expose nondamaged portions of the sealing member.