公开(公告)号：US20160358803A1

公开(公告)日：2016-12-08

申请号：US15152489

申请日：2016-05-11

Applicant: Applied Materials, Inc.

Inventor： Leung Kway LEE ,  Michael S. COX ,  Pallavi ZHANG

IPC: H01L21/683 ,  H01L21/677

CPC classification number: H01L21/6833 ,  H01L21/67336

Abstract: Embodiments described herein provide an electrostatic carrier for transferring a substrate. The electrostatic carrier may have a transparent body. The transparent body may have a first surface sized to transport the substrate into and out of a processing chamber. The electrostatic carrier may also have one or more electrostatic chucking electrodes coupled to the transparent body. The one or more electrostatic chucking electrodes may include a transparent conductive oxide material. In certain embodiments the transparent conductive oxide material is an indium-tin oxide material.

Abstract translation: 本文所述的实施例提供了用于转移衬底的静电载体。 静电载体可以具有透明体。 透明体可以具有尺寸适于将衬底输送进出处理室的第一表面。 静电载体也可以具有一个或多个耦合到透明体的静电吸附电极。 一个或多个静电吸附电极可以包括透明导电氧化物材料。 在某些实施方案中，透明导电氧化物材料是氧化铟锡材料。