公开(公告)号：US20200251310A1

公开(公告)日：2020-08-06

申请号：US16748632

申请日：2020-01-21

Applicant: Applied Materials, Inc.

Inventor： Madhu Santosh Kumar MUTYALA ,  Sanjay G. KAMATH ,  Deenesh PADHI ,  Arkajit Roy BARMAN

IPC: H01J37/32 ,  H05B1/02 ,  H01L21/67

Abstract: Embodiments described herein relate to gas line systems with a multichannel splitter spool. In these embodiments, the gas line systems will include a first gas line that is configured to supply a first gas. The first gas line is coupled to a multichannel splitter spool with a plurality of second gas lines into which the first gas flows. Each gas line of the plurality of second gas lines will have a smaller volume than the volume of the first gas line. The smaller second gas lines will be wrapped by a heater jacket. Due to the smaller volume of the second gas lines, when the first gas is flowed through the second gas lines, the heater jacket will sufficiently heat the first gas, eliminating the condensation induced particle defects that occur in conventional gas line systems when the first gas meets with a second gas in the gas line system.