公开(公告)号：US12217981B2

公开(公告)日：2025-02-04

申请号：US17689453

申请日：2022-03-08

Applicant: Applied Materials, Inc.

Inventor： Vijayabhaskara Venkatagiriyappa ,  Srinivas Ramakrishna ,  Mario Daniel Sanchez

IPC: H01L21/67

Abstract: Lid separators for vacuum processing chamber lid separation and vacuum processing chambers incorporating same are provided herein. In some embodiments, a lid separator for a vacuum processing chamber includes: a shaft having a first end and an opposing second end, wherein the shaft is threaded along at least a first portion of the shaft; and a contact pad having an outer diameter greater than an outer diameter of the shaft, a recess disposed in a first side of the contact pad, and a central opening disposed through a second side of the contact pad, opposite the first side, and into the recess, wherein the shaft is coupled to the contact pad, wherein the first end of the shaft extends through the central opening and into the recess without reaching the first side of the contact pad, and wherein the first portion and the second end of the shaft extend away from the second side of the contact pad.