公开(公告)号：US20210343512A1

公开(公告)日：2021-11-04

申请号：US16863719

申请日：2020-04-30

Applicant: Applied Materials, Inc.

Inventor： Vijay D. PARKHE ,  Andreas SCHMID ,  Andrew Antoine NOUJAIM ,  Stephen Donald PROUTY ,  Alvaro GARCIA DE GORORDO ,  Martin PEREZ-GUZMAN

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/683

Abstract: A substrate support assembly is described herein that includes a facility plate, a ground plate coupled to the facility plate, a fluid conduit disposed within the substrate support assembly disposed through the facility plate and the ground plate, and a connector coupled to the ground plate that houses a portion of the fluid conduit. The connector includes a biasing assembly and a fastener disposed in a pocket formed in the ground plate.