公开(公告)号：US20240427324A1

公开(公告)日：2024-12-26

申请号：US18341650

申请日：2023-06-26

Applicant: Applied Materials, Inc.

Inventor： Jimmy Iskandar ,  Fei LI ,  Arvind Shankar Raman ,  James Robert Moyne ,  Eda Tuncel ,  Michael Armacost

IPC: G05B23/02

Abstract: Implementations relate to techniques of monitoring conditions of tools used in device manufacturing systems. The techniques include storing a failure index (FI) model generated using run-time sensor data that was collected during operations of a tool that occurred prior to a low number of failures of the tool or even before any such failures occur. The FI model includes an FI function of the run-time sensor data and FI threshold value(s) associated with conditions of the tool. The techniques further include collecting new run-time sensor data and applying the FI model to the new run-time sensor data to identify one or more conditions associated with the tool. The techniques further include updating the FI model responsive to one or more tool failures.