公开(公告)号：US20240184858A1

公开(公告)日：2024-06-06

申请号：US18075055

申请日：2022-12-05

Applicant: Applied Materials, Inc.

Inventor： Peter J. Lindner ,  John G. Albright ,  Jimmy Iskandar ,  Michael D. Armacost

IPC: G06F18/25 ,  G06F18/21 ,  G06F18/2113 ,  G06F18/23 ,  G06F18/2433

CPC classification number: G06F18/25 ,  G06F18/2113 ,  G06F18/2193 ,  G06F18/23 ,  G06F18/2433

Abstract: An electronic device manufacturing system configured to obtain, by a processor, a plurality of datasets associated with a process recipe, wherein each dataset of the plurality of datasets comprises data generated by a plurality of sensors during a corresponding process run performed using the process recipe. The processor is further configured to determine, using the plurality of data sets associated with the process recipe, a correlation value between two or more sensors of the plurality of sensors. Responsive to the correlation value satisfying a threshold criterion, the processor assigns the two or more sensors to a cluster. During a subsequent process run, the processor generates an anomaly score associated with the cluster and indicative of an anomaly associated with at least one step of the subsequent process run.

公开(公告)号：US20220019863A1

公开(公告)日：2022-01-20

申请号：US16947052

申请日：2020-07-16

Applicant: Applied Materials, Inc.

Inventor： Jimmy Iskandar ,  Michael D. Armacost

IPC: G06K9/62 ,  G06N3/04

Abstract: Implementations disclosed describe a method and a system to perform the method of obtaining a reduced representation of a plurality of sensor statistics representative of data collected by a plurality of sensors associated with a device manufacturing system performing a manufacturing operation. The method further includes generating, using a plurality of outlier detection models, a plurality of outlier scores, each of the plurality of outlier scores generated based on the reduced representation of the plurality of sensor statistics using a respective one of the plurality of outlier detection models. The method further includes processing the plurality of outlier scores using a detector neural network to generate an anomaly score indicative of a likelihood of an anomaly associated with the manufacturing operation.

公开(公告)号：US10884400B2

公开(公告)日：2021-01-05

申请号：US15444647

申请日：2017-02-28

Applicant: Applied Materials, Inc.

Inventor： James Robert Moyne ,  Jimmy Iskandar

IPC: H05K3/00 ,  H01L21/67 ,  G05B19/418 ,  G05B13/04 ,  H01L21/66 ,  G03F7/20 ,  F27B17/00 ,  C23C16/00

Abstract: Described herein are methods and systems for chamber matching in a manufacturing facility. A method may include receiving a first chamber recipe advice for a first chamber and a second chamber recipe advice for a second chamber. The chamber recipe advices describe a set of tunable inputs and a set of outputs for a process. The method may further include adjusting at least one of the set of first chamber input parameters or the set of second chamber input parameters and at least one of the set of first chamber output parameters or the set of second chamber output parameters to substantially match the first and second chamber recipe advices.

公开(公告)号：US10042357B2

公开(公告)日：2018-08-07

申请号：US14061725

申请日：2013-10-23

Applicant: Applied Materials, Inc.

Inventor： James R. Moyne ,  Jimmy Iskandar ,  Bradley D. Schulze

IPC: G06F11/30 ,  G21C17/00 ,  G05B23/02 ,  G05B19/418

Abstract: Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.

公开(公告)号：US20160342147A1

公开(公告)日：2016-11-24

申请号：US14716838

申请日：2015-05-19

Applicant: Applied Materials, Inc.

Inventor： Jimmy Iskandar ,  Jianping Zou ,  Parris C.M. Hawkins ,  James Moyne

IPC: G05B19/402 ,  G05B19/404

CPC classification number: G05B23/0294 ,  G05B23/024

Abstract: Described herein are methods, apparatuses, and systems for reducing equipment repair time. In one embodiment, a computer implemented method includes collecting, with a system, data including test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility and determining, with the system, a relationship between tool parameter settings for the at least one manufacturing tool and at least some collected data including the test substrate data. The method further includes utilizing zero or more virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool based on the test substrate data and obtain at least one tool parameter adjustment for at least one target parameter for the at least one manufacturing tool. Applying multivariate run-to-run (R2R) control modeling to obtain tool parameter adjustments for at least one manufacturing tool occurs after maintenance to reduce maintenance recovery time and to reduce requalification time.

Abstract translation: 这里描述了用于减少设备维修时间的方法，装置和系统。 在一个实施例中，计算机实现的方法包括与系统一起收集包括测试基板数据或其他测量数据和故障检测数据的数据，用于在制造设备中维护至少一个制造工具的恢复，并且与系统确定关系 在至少一个制造工具的工具参数设置和包括测试衬底数据的至少一些收集的数据之间。 该方法还包括利用零个或多个虚拟测量预测算法和至少一些收集的数据来获得度量预测和应用多变量运行（R2R）控制建模，以获得包括至少至少的当前操作区域的状态估计 一个基于测试基板数据的制造工具，并为至少一个制造工具的至少一个目标参数获得至少一个刀具参数调整。 应用多变量运行（R2R）控制建模以获得至少一个制造工具的工具参数调整，在维护后发生，以减少维护恢复时间并减少重新定标时间。

公开(公告)号：US20230376020A1

公开(公告)日：2023-11-23

申请号：US17748774

申请日：2022-05-19

Applicant: Applied Materials, Inc.

Inventor： Jimmy Iskandar ,  Fei Li ,  James Robert Moyne

IPC: G05B19/418

CPC classification number: G05B19/41885 ,  G05B19/41875 ,  G05B19/4183 ,  G06N20/00

Abstract: A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates that have property values that meet threshold values. The method further includes determining, based on the trace data, a dynamic acceptable area outside of guardband limits. The method further includes causing, based on the dynamic acceptable area outside of the guardband limits, performance of a corrective action associated with the substrate processing system.

公开(公告)号：US11789427B2

公开(公告)日：2023-10-17

申请号：US17511450

申请日：2021-10-26

Applicant: Applied Materials, Inc.

Inventor： James Robert Moyne ,  Jimmy Iskandar

IPC: G05B19/4099 ,  G06N20/00

CPC classification number: G05B19/4099 ,  G06N20/00 ,  G05B2219/45031

Abstract: A method includes receiving one or more fingerprint dimensions to be used to generate a fingerprint. The method further includes receiving trace data associated with a manufacturing process. The method further includes applying the one or more fingerprint dimensions to the trace data to generate at least one feature. The method further includes generating the fingerprint based on the at least one feature. The method further includes causing, based on the fingerprint, performance of a corrective action associated with one or more manufacturing processes.

公开(公告)号：US11126172B2

公开(公告)日：2021-09-21

申请号：US16538689

申请日：2019-08-12

Applicant: Applied Materials, Inc.

Inventor： Jimmy Iskandar ,  Jianping Zou ,  Parris C. M. Hawkins ,  James Moyne

IPC: G05B23/02

Abstract: Described herein are methods, apparatuses, and systems for reducing equipment repair time. In one embodiment, a computer implemented method includes collecting test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility and determining a relationship between tool parameter settings for the manufacturing tool and the test substrate data. The method further includes utilizing virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool. Applying multivariate run-to-run (R2R) control modeling to obtain tool parameter adjustments for at least one manufacturing tool to reduce maintenance recovery time and to reduce requalification time.

公开(公告)号：US11054815B2

公开(公告)日：2021-07-06

申请号：US15457016

申请日：2017-03-13

Applicant: Applied Materials, Inc.

Inventor： Bradley D. Schulze ,  Suketu Arun Parikh ,  Jimmy Iskandar ,  Jigar Bhadriklal Patel

IPC: G05B23/02

Abstract: Techniques are provided for classifying runs of a recipe within a manufacturing environment. Embodiments monitor a plurality of runs of a recipe to collect runtime data from a plurality of sensors within a manufacturing environment. Qualitative data describing each semiconductor devices produced by the plurality of runs is determined. Embodiments characterize each run into a respective group, based on an analysis of the qualitative data, and generate a data model based on the collected runtime data. A multivariate analysis of additional runtime data collected during at least one subsequent run of the recipe is performed to classify the at least one subsequent run into a first group. Upon classifying the at least one subsequent run, embodiments output for display an interface depicting a ranking sensor types based on the additional runtime data and the description of relative importance of each sensor type for the first group within the data model.

公开(公告)号：US20140114611A1

公开(公告)日：2014-04-24

申请号：US14061725

申请日：2013-10-23

Applicant: Applied Materials, Inc.

Inventor： James R. Moyne ,  Jimmy Iskandar ,  Bradley D. Schulze

IPC: G01M99/00

CPC classification number: G05B23/0272 ,  G05B19/4184 ,  G05B23/024 ,  Y02P90/14

Abstract: Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.

Abstract translation: 这里描述了用于提供用户界面以指示制造设施中的工具的健康的方法和系统。 一种方法可以包括：经由用户界面接收用户选择与制造设备中的工具相关的故障检测数据，使用故障检测数据获取所述工具的健康异常指示，以及将所述工具的健康异常指示符呈现在 用户界面。