公开(公告)号：US20220341867A1

公开(公告)日：2022-10-27

申请号：US17861034

申请日：2022-07-08

Applicant: Applied Materials, Inc.

Inventor： YAOLING PAN ,  PATRICK JOHN TAE ,  LEONARD TEDESCHI ,  MICHAEL D. WILLWERTH ,  DANIEL THOMAS MCCORMICK

IPC: G01N27/22

Abstract: Embodiments disclosed herein include a sensor assembly. In an embodiment, the sensor assembly comprises a sensor module and a housing assembly. In an embodiment, the sensor module comprises a substrate, a capacitor with a first electrode and a second electrode on the substrate, and a capacitive-to-digital converter (CDC) electrically coupled to the first electrode and the second electrode. In an embodiment, the housing assembly is attached to the sensor module and comprises a shaft, wherein the shaft is hollow, and a cap over a first end of the shaft, wherein the cap has an opening to expose the capacitor.