公开(公告)号：US20200035527A1

公开(公告)日：2020-01-30

申请号：US16592084

申请日：2019-10-03

Applicant: Applied Materials, Inc.

Inventor： Fuhong Zhang ,  Sunil Kumar Garg ,  Paul Kiely ,  Martin Lee Riker ,  William Fruchterman ,  Zheng Wang ,  Xiaodong Wang

IPC: H01L21/67 ,  G05B19/418 ,  G05B15/02

Abstract: Methods and apparatus to minimize electromagnetic interference between adjacent process chambers of a cluster tool are described. The start time of the subject recipe is controlled based on the electromagnetic process window of the subject process chamber, the electromagnetic window of the first adjacent process chamber and of an optional second adjacent process chamber. The start time of the subject process chamber is controlled to prevent temporal overlap of the electromagnetic window of the subject chamber with the electromagnetic window of an adjacent chamber.

公开(公告)号：US10972280B2

公开(公告)日：2021-04-06

申请号：US16155318

申请日：2018-10-09

Applicant: Applied Materials, Inc.

Inventor： Adolph Miller Allen ,  Paul Kiely ,  Noufal Kappachali

IPC: H04L9/32

Abstract: Profile_ID files, containing proprietary hardware operating details of an originating user who originates a process recipe, are encrypted before dissemination of the process recipe to an end user. Blockchain technology is used to enable the end user to validate the encrypted process recipe and control uniform validated process across multiple chambers and locations.

公开(公告)号：US11335577B2

公开(公告)日：2022-05-17

申请号：US16592084

申请日：2019-10-03

Applicant: Applied Materials, Inc.

Inventor： Fuhong Zhang ,  Sunil Kumar Garg ,  Paul Kiely ,  Martin Lee Riker ,  William Fruchterman ,  Zheng Wang ,  Xiaodong Wang

IPC: H01L21/67 ,  G05B15/02 ,  G05B19/418

Abstract: Methods and apparatus to minimize electromagnetic interference between adjacent process chambers of a cluster tool are described. The start time of the subject recipe is controlled based on the electromagnetic process window of the subject process chamber, the electromagnetic window of the first adjacent process chamber and of an optional second adjacent process chamber. The start time of the subject process chamber is controlled to prevent temporal overlap of the electromagnetic window of the subject chamber with the electromagnetic window of an adjacent chamber.

公开(公告)号：US10438828B2

公开(公告)日：2019-10-08

申请号：US15718336

申请日：2017-09-28

Applicant: Applied Materials, Inc.

Inventor： Fuhong Zhang ,  Sunil Kumar Garg ,  Paul Kiely ,  Martin Lee Riker ,  William Fruchterman ,  Zheng Wang ,  Xiaodong Wang

IPC: H01L21/67 ,  G05B15/02 ,  G05B19/418

Abstract: Methods and apparatus to minimize electromagnetic interference between adjacent process chambers of a cluster tool are described. The start time of the subject recipe is controlled based on the electromagnetic process window of the subject process chamber, the electromagnetic window of the first adjacent process chamber and of an optional second adjacent process chamber. The start time of the subject process chamber is controlled to prevent temporal overlap of the electromagnetic window of the subject chamber with the electromagnetic window of an adjacent chamber.

公开(公告)号：US20180096871A1

公开(公告)日：2018-04-05

申请号：US15718336

申请日：2017-09-28

Applicant: Applied Materials, Inc.

Inventor： Fuhong Zhang ,  Sunil Kumar Garg ,  Paul Kiely ,  Martin Lee Riker ,  William Fruchterman ,  Zheng Wang ,  Xiaodong Wang

IPC: H01L21/67 ,  G05B15/02

CPC classification number: H01L21/67276 ,  G05B15/02 ,  G05B19/41865 ,  G05B2219/32275 ,  Y02P90/20

Abstract: Methods and apparatus to minimize electromagnetic interference between adjacent process chambers of a cluster tool are described. The start time of the subject recipe is controlled based on the electromagnetic process window of the subject process chamber, the electromagnetic window of the first adjacent process chamber and of an optional second adjacent process chamber. The start time of the subject process chamber is controlled to prevent temporal overlap of the electromagnetic window of the subject chamber with the electromagnetic window of an adjacent chamber.