公开(公告)号：US20240427308A1

公开(公告)日：2024-12-26

申请号：US18213790

申请日：2023-06-23

Applicant: Applied Materials, Inc.

Inventor： Rituraj Nandan ,  Ramachandran Subramanian ,  Brett Robert Schroeder ,  Pardeep Kumar ,  Zhenxing Han ,  Martha Inez Sanchez ,  Bharath Ram Sundar ,  Madhur Singh Sachan ,  Sundar Narayanan

IPC: G05B19/4099

Abstract: A method includes receiving data indicative of a range of processing conditions associated with a plurality of substrate processing operations. The data indicative of the range of processing conditions includes a first range of values of a first property and a second range of values of a second property of the processing conditions. The method further includes receiving data indicative of processing performance associated with the plurality of processed substrates. The data includes a first set of data associated with a first indication of substrate performance and a second set of data associated with a second indication of substrate performance. The method further includes performing analysis relating the processing conditions to the processing performance. The method further includes generating a visualization presenting results of the analysis including representations of the first indication of substrate performance and the second indication of substrate performance.