公开(公告)号：US20240086597A1

公开(公告)日：2024-03-14

申请号：US18244787

申请日：2023-09-11

Applicant: Applied Materials, Inc.

Inventor： Sundar Narayanan ,  Samit Barai ,  Nusrat Jahan Chhanda ,  Dheeraj Kumar ,  Pardeep Kumar ,  Anantha R. Sethuraman ,  Raman Krishnan Nurani

IPC: G06F30/27

CPC classification number: G06F30/27

Abstract: A method includes receiving profile data of a plurality of features of a substrate. The method further includes generating a typical profile based on the profile data of the plurality of features. The method further includes generating a first array of features. Each of the first array of features is based on the typical profile. The method further includes providing the first array of features to a process model. The method further includes obtaining first output from the process model based on the first array of features. The method further includes causing performance of a corrective action in view of the first output from the process model.

公开(公告)号：US20240427308A1

公开(公告)日：2024-12-26

申请号：US18213790

申请日：2023-06-23

Applicant: Applied Materials, Inc.

Inventor： Rituraj Nandan ,  Ramachandran Subramanian ,  Brett Robert Schroeder ,  Pardeep Kumar ,  Zhenxing Han ,  Martha Inez Sanchez ,  Bharath Ram Sundar ,  Madhur Singh Sachan ,  Sundar Narayanan

IPC: G05B19/4099

Abstract: A method includes receiving data indicative of a range of processing conditions associated with a plurality of substrate processing operations. The data indicative of the range of processing conditions includes a first range of values of a first property and a second range of values of a second property of the processing conditions. The method further includes receiving data indicative of processing performance associated with the plurality of processed substrates. The data includes a first set of data associated with a first indication of substrate performance and a second set of data associated with a second indication of substrate performance. The method further includes performing analysis relating the processing conditions to the processing performance. The method further includes generating a visualization presenting results of the analysis including representations of the first indication of substrate performance and the second indication of substrate performance.

公开(公告)号：US20240152675A1

公开(公告)日：2024-05-09

申请号：US17982157

申请日：2022-11-07

Applicant: Applied Materials, Inc.

Inventor： Dheeraj Kumar ,  Samit Barai ,  Pardeep Kumar ,  Sundar Narayanan ,  Anantha Sethuraman

IPC: G06F30/31 ,  G06F30/3308

CPC classification number: G06F30/31 ,  G06F30/3308

Abstract: A method includes receiving feature data defining a plurality of features of a virtual substrate. The method further includes preparing the virtual substrate for display on a graphical user interface (GUI). The method further includes receiving one or more first inputs via the GUI. The one or more first inputs are associated with one or more locations of the virtual substrate. The method further includes defining a three-dimensional measurement probe based on the one or more first inputs. The method further includes outputting a measurement of the measurement probe. The measurement is associated with a characteristic of the virtual substrate measured by the three-dimensional measurement probe.