公开(公告)号：US20230221521A1

公开(公告)日：2023-07-13

申请号：US18020169

申请日：2021-09-10

Applicant: Applied Materials, Inc.

Inventor： Timothy N. THOMAS ,  Robert Jordan LEAR ,  Douglas E. HOLMGREN ,  Assaf KIDRON ,  Nigel SWEHLA

IPC: G02B7/182 ,  G02B26/08 ,  G03B21/00 ,  G03B21/16 ,  F16B5/02 ,  G03F7/20

CPC classification number: G02B7/182 ,  F16B5/0258 ,  F16B5/0266 ,  G02B26/0833 ,  G03B21/008 ,  G03B21/16 ,  G03F7/70191

Abstract: Embodiments of the present disclosure relate to mount apparatuses for digital micromirror devices of digital lithography systems and methods of mounting the digital micromirror devices. The mount apparatuses described herein retain spatial light modulators, such as DMDs. The mount apparatus enables the flattening of the DMD by providing a force such that the pair of contact pads contact the DMD. The DMD is positioned in a mounting frame of the mount apparatus. Contact pads of the mounting frame are operable to apply pressure to the DMD.