公开(公告)号：US20240068093A1

公开(公告)日：2024-02-29

申请号：US17896025

申请日：2022-08-25

Applicant: Applied Materials, Inc.

Inventor： Ryan T. DOWNEY ,  James L'HEUREUX ,  Rony David MATHEW

IPC: C23C16/44 ,  H01J37/32

CPC classification number: C23C16/4412 ,  H01J37/3244 ,  H01J37/32834

Abstract: A system and method for controlling pressure in a foreline of a processing system are disclosed herein that reduce variation in foreline pressure. In one example, a processing system is provided that includes a first process chamber, a first pump, a foreline, and a first foreline pressure control system. The first pump has an inlet and an outlet. The inlet of the first pump coupled to an exhaust port of the first process chamber. The foreline is coupled to the outlet of the first pump. The first foreline pressure control system is fluidly coupled to the foreline downstream of the first pump. The first foreline pressure control system is operable to control a pressure in the foreline independent from operation of the first pump.