公开(公告)号：US20250091094A1

公开(公告)日：2025-03-20

申请号：US18471190

申请日：2023-09-20

Applicant: Applied Materials, Inc.

Inventor： Benjamin Clay Bradley ,  Ryan Michael Thompson

IPC: B08B1/00 ,  B08B3/08

Abstract: Exemplary seal cleaning apparatuses may include at least one support that is configured to receive a seal. The apparatuses may include a tool arm that is positionable within an interior of the seal. The apparatuses may include a pad holder that is rotatably coupled with the tool arm. The pad holder may include a body having a first end and a second end. The first end may define a channel that is configured to receive a cleaning pad. The body may define an aperture that extends from the second end through the channel. The pad holder may include a fluid fitting coupled with the aperture at the second end of the body. The apparatuses may include a cleaning fluid source that is fluidly coupled with the fluid fitting.