公开(公告)号：US20220205091A1

公开(公告)日：2022-06-30

申请号：US17697845

申请日：2022-03-17

申请人： Applied Materials, Inc.

发明人： Jonathan Frankel ,  Quoc Truong ,  Sekar Krishnasamy ,  Govindraj Desai ,  Sandip S. Desai

IPC分类号： C23C16/44 ,  C23C16/455 ,  B01J19/00 ,  B01J19/18 ,  B01F27/051 ,  B01F27/70 ,  B01F27/07 ,  B01F27/112 ,  B01F27/072

摘要： A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.

公开(公告)号：US20200340108A1

公开(公告)日：2020-10-29

申请号：US16855887

申请日：2020-04-22

申请人： Applied Materials, Inc.

发明人： Jonathan Frankel ,  Quoc Truong ,  Sekar Krishnasamy ,  Govindraj Desai ,  Sandip S. Desai

IPC分类号： C23C16/44 ,  C23C16/455

摘要： A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.

公开(公告)号：US11299806B2

公开(公告)日：2022-04-12

申请号：US16855887

申请日：2020-04-22

申请人： Applied Materials, Inc.

发明人： Jonathan Frankel ,  Quoc Truong ,  Sekar Krishnasamy ,  Govindraj Desai ,  Sandip S. Desai

IPC分类号： C23C16/44 ,  C23C16/455 ,  B01J19/00 ,  B01J19/18 ,  B01F27/051 ,  B01F27/70 ,  B01F27/07 ,  B01F27/112 ,  B01F27/072

摘要： A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.