公开(公告)号：US20250079137A1

公开(公告)日：2025-03-06

申请号：US18241840

申请日：2023-09-01

Applicant: Applied Materials, Inc.

Inventor： Thomas BREZOCZKY ,  Kirankumar Neelasandra SAVANDAIAH ,  Srinivasan MANIVANNAN ,  Arun RENGARAJ

IPC: H01J37/32

Abstract: A substrate support assembly includes a substrate support that is moveable between a raised position, a lowered position below the raised position, and an intermediate position between the raised and lowered positions. A lift pin is disposed in a hole through the substrate support, and is movable vertically with respect to the substrate support. In use, the substrate support assembly transitions between first and second configurations. In the first configuration, the substrate support and the lift pin are coupled such that the lift pin and the substrate support move simultaneously while the substrate support moves between the lowered position and the intermediate position. In the second configuration, the substrate support and the lift pin are decoupled such that the lift pin remains stationary while the substrate support moves between the intermediate position and the raised position.