公开(公告)号：US20190293199A1

公开(公告)日：2019-09-26

申请号：US16341703

申请日：2017-12-01

Applicant: Applied Materials, Inc.

Inventor： Charles T. CARLSON ,  Tammy Jo PRIDE ,  Benjamin B. RIORDON ,  Aaron WEBB

IPC: F16K27/02 ,  F16K1/20 ,  F16K11/10

Abstract: Embodiments of the disclosure generally relate to a flapper valve. The flapper valve may be used with processing chambers, such as semiconductor substrate processing chambers. In one embodiment, a flapper valve includes a housing having a first opening at a first end thereof and a second opening at a second end thereof, a first flapper pivotably disposed in the housing, and a second flapper pivotably disposed in the housing. The first and second flappers are movable to selectively open and close at least one of the first opening and the second opening.