公开(公告)号：US20240329626A1

公开(公告)日：2024-10-03

申请号：US18191710

申请日：2023-03-28

Applicant: Applied Materials, Inc.

Inventor： Kay Siong NG ,  Yunpeng WU ,  Olivia Fatma KOENTJORO ,  Roger Alan LINDLEY

IPC: G05B19/418

CPC classification number: G05B19/41885 ,  G05B2219/45032

Abstract: The disclosure describes methods and systems for operating a manufacturing process with a concurrent real-time simulation of the manufacturing process via a digital twin model. Sensor data indicative of parameters of an ongoing manufacturing process are input into the digital twin model, and used to predict an output of the manufacturing process. The predicted output is compared to a target output. One or more trained machine learning models are used to determine a corrective action to be implemented by a controller of the manufacturing process to minimize any deviation from the target output.