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公开(公告)号：US09690105B2
公开(公告)日：2017-06-27
申请号：US15046377
申请日：2016-02-17
Applicant: Applied Materials Israel, Ltd.
Inventor： Binyamin Kirshner , Haim Eder
CPC classification number: G02B27/0927 , G01J1/4257 , G02B7/003 , G02B27/0025 , G06T7/001 , G06T7/32
Abstract: A beam shaping system including: a first and second optical modules that are accommodated in a spaced-apart relationship in an optical path of light through the system to sequentially apply beam shaping to light incident thereon. The beam shaping system includes first and second alignment modules respectively carrying the first and second optical modules and operable for laterally positioning the optical modules with respect to the optical path. A calibration module of the beam shaping system is connectable to the first and second alignment modules and is operable to sequentially calibrate and align the respective lateral positions of the first and second optical modules with respect to the optical path. The system thereby enables shaping of an incoming light beam of given predetermined wave-front and lateral intensity distribution to form an output light beam having desired wave-front and desired lateral intensity distribution.
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公开(公告)号：US20160018660A1
公开(公告)日：2016-01-21
申请号：US14336862
申请日：2014-07-21
Applicant: APPLIED MATERIALS ISRAEL, LTD.
Inventor： Yoav Berlatzky , Seffi Sadeh , Ido Kofler , Haim Eder , Michael Rudman , Hagay Famini
IPC: G02B27/09 , H01L27/146
CPC classification number: G02B27/0905 , G02B5/201 , G02B21/06 , G02B27/143
Abstract: A spatial beam shaper structure and a corresponding optical system are provided. The spatial beam shaper structure comprises a light collecting surface configured for affecting light impinging thereon to provide a substantially smooth light profile of at least one optical property, the light collecting surface having a pattern in the form of multiple surface regions comprising regions of at least two different optical properties arranged in an alternating fashion, wherein an interface region between each two locally adjacent regions of the different optical properties has the at least two different optical properties, to provide substantially smooth transition of said different optical properties within the interface region.
Abstract translation: 提供空间光束整形器结构和相应的光学系统。 空间光束整形器结构包括光收集表面，其被配置用于影响入射到其上的光以提供至少一个光学特性的基本平滑的光分布，所述光收集表面具有多个表面区域形式的图案，所述多个表面区域包括至少两个 以交替方式布置的不同光学性质，其中不同光学性质的每个两个局部相邻区域之间的界面区域具有至少两个不同的光学性质，以提供所述不同光学性质在界面区域内的基本上平滑的转变。
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Patent Agency Ranking
公开(公告)号：US09291825B2
公开(公告)日：2016-03-22
申请号：US13849187
申请日：2013-03-22
Applicant: Applied Materials Israel, Ltd.
Inventor： Binyamin Kirshner , Haim Eder
CPC classification number: G02B27/0927 , G01J1/4257 , G02B7/003 , G02B27/0025 , G06T7/001 , G06T7/32
Abstract: A beam shaping system including: a first and second optical modules that are accommodated in a spaced-apart relationship in an optical path of light through the system to sequentially apply beam shaping to light incident thereon. The beam shaping system includes first and second alignment modules respectively carrying the first and second optical modules and operable for laterally positioning the optical modules with respect to the optical path. A calibration module of the beam shaping system is connectable to the first and second alignment modules and is operable to sequentially calibrate and align the respective lateral positions of the first and second optical modules with respect to the optical path. The system thereby enables shaping of an incoming light beam of given predetermined wave-front and lateral intensity distribution to form an output light beam having desired wave-front and desired lateral intensity distribution.
Abstract translation: 一种光束整形系统，包括：第一和第二光学模块，其以相互间隔的关系容纳在通过该系统的光学光路中，以顺序对其上入射的光进行光束整形。 光束整形系统包括分别承载第一和第二光学模块的第一和第二对准模块，并且可操作以相对于光路横向地定位光学模块。 光束成形系统的校准模块可连接到第一和第二对准模块，并且可操作以相对于光路顺序校准和校准第一和第二光学模块的相应横向位置。 因此，该系统能够对给定的预定波前和横向强度分布的入射光束进行成形，以形成具有期望的波前和期望的横向强度分布的输出光束。
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公开(公告)号：US20140285877A1
公开(公告)日：2014-09-25
申请号：US13849187
申请日：2013-03-22
Applicant: Applied Materials Israel, Ltd.
Inventor： Binyamin Kirshner , Haim Eder
CPC classification number: G02B27/0927 , G01J1/4257 , G02B7/003 , G02B27/0025 , G06T7/001 , G06T7/32
Abstract: A beam shaping system including: a first and second optical modules that are accommodated in a spaced-apart relationship in an optical path of light through the system to sequentially apply beam shaping to light incident thereon. The beam shaping system includes first and second alignment modules respectively carrying the first and second optical modules and operable for laterally positioning the optical modules with respect to the optical path. A calibration module of the beam shaping system is connectable to the first and second alignment modules and is operable to sequentially calibrate and align the respective lateral positions of the first and second optical modules with respect to the optical path. The system thereby enables shaping of an incoming light beam of given predetermined wave-front and lateral intensity distribution to form an output light beam having desired wave-front and desired lateral intensity distribution.
Abstract translation: 一种光束整形系统，包括：第一和第二光学模块，其以相互间隔的关系容纳在通过该系统的光学光路中，以顺序对其上入射的光进行光束整形。 光束整形系统包括分别承载第一和第二光学模块的第一和第二对准模块，并且可操作以相对于光路横向地定位光学模块。 光束成形系统的校准模块可连接到第一和第二对准模块，并且可操作以相对于光路顺序校准和校准第一和第二光学模块的相应横向位置。 因此，该系统能够对给定的预定波前和横向强度分布的入射光束进行成形，以形成具有期望的波前和期望的横向强度分布的输出光束。
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公开(公告)号：US20140197322A1
公开(公告)日：2014-07-17
申请号：US14115326
申请日：2012-05-02
Applicant: Applied Materials Israel Ltd.
Inventor： Haim Eder , Nissim Elmaliach , Igor Krayvitz (Krivts) , Mario Mützel
CPC classification number: G01T1/2002 , G01J1/0425 , G01N21/253 , G01N21/62 , G01N21/6452 , G01N2201/0833 , H01J37/244 , H01J37/28 , H01J2237/2445 , H01J2237/2446
Abstract: Apparatus for detecting optical radiation emitted from an array of spots on an object. The apparatus includes a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots. Relay optics collect and focus the optical radiation from the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots. Multiple detectors and each coupled to receive the optical radiation from an output end of a respective one of the light guides.
Abstract translation: 用于检测从物体上的点阵列发射的光辐射的装置。 该装置包括具有各自的输入端和输出端的多个光导，其输入端被排列成对应于斑点阵列的几何布置。 继电器光学器件将来自物体的光学辐射聚焦并聚焦到输入端上，使得每个输入端从相应的一个光点接收光学辐射。 多个检测器，每个检测器被耦合以从相应的一个光导的输出端接收光辐射。
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公开(公告)号：US09664907B2
公开(公告)日：2017-05-30
申请号：US14336862
申请日：2014-07-21
Applicant: APPLIED MATERIALS ISRAEL, LTD.
Inventor： Yoav Berlatzky , Seffi Sadeh , Ido Kofler , Haim Eder , Michael Rudman , Hagay Famini
IPC: G02B27/09 , H01L27/146 , G02B21/06 , G02B5/20 , G02B27/14
CPC classification number: G02B27/0905 , G02B5/201 , G02B21/06 , G02B27/143
Abstract: A spatial beam shaper structure and a corresponding optical system are provided. The spatial beam shaper structure comprises a light collecting surface configured for affecting light impinging thereon to provide a substantially smooth light profile of at least one optical property, the light collecting surface having a pattern in the form of multiple surface regions comprising regions of at least two different optical properties arranged in an alternating fashion, wherein an interface region between each two locally adjacent regions of the different optical properties has the at least two different optical properties, to provide substantially smooth transition of said different optical properties within the interface region.
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公开(公告)号：US20160161750A1
公开(公告)日：2016-06-09
申请号：US15046377
申请日：2016-02-17
Applicant: Applied Materials Israel, Ltd.
Inventor： Binyamin Kirshner , Haim Eder
CPC classification number: G02B27/0927 , G01J1/4257 , G02B7/003 , G02B27/0025 , G06T7/001 , G06T7/32
Abstract: A beam shaping system including: a first and second optical modules that are accommodated in a spaced-apart relationship in an optical path of light through the system to sequentially apply beam shaping to light incident thereon. The beam shaping system includes first and second alignment modules respectively carrying the first and second optical modules and operable for laterally positioning the optical modules with respect to the optical path. A calibration module of the beam shaping system is connectable to the first and second alignment modules and is operable to sequentially calibrate and align the respective lateral positions of the first and second optical modules with respect to the optical path. The system thereby enables shaping of an incoming light beam of given predetermined wave-front and lateral intensity distribution to form an output light beam having desired wave-front and desired lateral intensity distribution.
Abstract translation: 一种光束整形系统，包括：第一和第二光学模块，其以相互间隔的关系容纳在通过该系统的光学光路中，以顺序对其上入射的光进行光束整形。 光束整形系统包括分别承载第一和第二光学模块的第一和第二对准模块，并且可操作以相对于光路横向地定位光学模块。 光束成形系统的校准模块可连接到第一和第二对准模块，并且可操作以相对于光路顺序校准和校准第一和第二光学模块的相应横向位置。 因此，该系统能够对给定的预定波前和横向强度分布的入射光束进行成形，以形成具有期望的波前和期望的横向强度分布的输出光束。
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