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公开(公告)号：US20240230530A9
公开(公告)日：2024-07-11
申请号：US17972339
申请日：2022-10-24
Applicant: Applied Materials Israel Ltd.
Inventor： Benny Kirshner , Boris Golberg
CPC classification number: G01N21/47 , G01N21/9501 , G01N2201/0636
Abstract: A method for phase retrieval, the method may include (a) obtaining multiple out-of-focus intensity images of one or more point spread function targets; wherein the out-of-focus intensity images are generated by based on residual collected light signals obtained by a residual collection channel of an optical unit having a numerical aperture that exceeds 0.8; and (b) calculating phase information, based on the multiple out-of-focus intensity images and on a vectorial model of the point spread function.
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公开(公告)号：US20240133807A1
公开(公告)日：2024-04-25
申请号：US17972339
申请日：2022-10-23
Applicant: Applied Materials Israel Ltd.
Inventor： Benny Kirshner , Boris Golberg
CPC classification number: G01N21/47 , G01N21/9501 , G01N2201/0636
Abstract: A method for phase retrieval, the method may include (a) obtaining multiple out-of-focus intensity images of one or more point spread function targets; wherein the out-of-focus intensity images are generated by based on residual collected light signals obtained by a residual collection channel of an optical unit having a numerical aperture that exceeds 0.8; and (b) calculating phase information, based on the multiple out-of-focus intensity images and on a vectorial model of the point spread function.
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