公开(公告)号：US11101105B1

公开(公告)日：2021-08-24

申请号：US16885740

申请日：2020-05-28

Applicant: Applied Materials Israel Ltd.

Inventor： Denys Mets

IPC: H01J37/28 ,  H01J37/244 ,  G01N23/2251 ,  H01J37/248 ,  H01J37/24

Abstract: A method, and a high voltage (HV) system that may include a noise reduction unit (MNRU) and a bias setting unit (BSU). The HV system may receive a HV supply signal, over a high voltage supply line from a HV supply unit. The HV supply unit, the MNRU, the BSU and a HV charged particle system may share a ground. At least the MNRU may detect noise in the HV supply signal and send, though the ground, a noise compensation signal. The BSU may receive an indication about a requested value of a bias voltage, and apply the bias voltage to a noise compensated HV signal to provide a biased and noise compensated HV signal to the HV charged particle system.