公开(公告)号：US20230417683A1

公开(公告)日：2023-12-28

申请号：US18367591

申请日：2023-09-13

Applicant: Applied Materials Israel Ltd.

Inventor： Elad Eizner ,  Amir Shoham

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N2021/8848

Abstract: An optical inspection system, including (a) an illumination optics that is configured to generate an illumination light beam and to illuminate a sample with the illumination light beam; (b) at least one collection optics configured to collect light from the sample as a result of an impingement of the illumination light beam on the sample; (c) at least one detector configured to detect at least one detected light beam outputted from the at least one collection optics; (d) multiple polarizers that comprise at least one inhomogeneous polarizer and at least one half-wave plate; and (e) at least one movement unit that is configured to move, under a control of a control unit of the optical inspection system, the at least one inhomogeneous polarizer thereby impacting a polarization of one or more light beams out of the illumination light beam, and the at least one detected light beam.

公开(公告)号：US20230117345A1

公开(公告)日：2023-04-20

申请号：US17506040

申请日：2021-10-20

Applicant: Applied Materials Israel Ltd.

Inventor： Elad Eizner ,  Amir Shoham

IPC: G02B21/06 ,  G02B5/30 ,  G01N21/95 ,  G01N21/47

Abstract: An optical inspection system that may include an illumination optics configured to generate an illumination light beam and to illuminate a sample with the illumination light beam; at least one collection optics configured to collect light from the sample; at least one detector configured to detect at least one detected light beam outputted from the at least one collection optics; multiple polarizers that are configured to (a) set a polarization of the illumination light beam by selectively introducing, under a control of the control unit, at least one illumination optics polarization change, and (b) set a polarization of the at least one detected light beam by selectively introducing, under a control of the control unit, at least one collection optics polarization change. The multiple polarizers may include one or more illumination half-wave plates, one or more quarter-wave plates, and one or more inhomogeneous polarizers.

公开(公告)号：US11796783B2

公开(公告)日：2023-10-24

申请号：US17506040

申请日：2021-10-20

Applicant: Applied Materials Israel Ltd.

Inventor： Elad Eizner ,  Amir Shoham

IPC: G02B21/06 ,  G02B5/30 ,  G01N21/47 ,  G01N21/95

CPC classification number: G02B21/06 ,  G01N21/47 ,  G01N21/9501 ,  G02B5/3025 ,  G01N2201/063

Abstract: An optical inspection system that may include an illumination optics configured to generate an illumination light beam and to illuminate a sample with the illumination light beam; at least one collection optics configured to collect light from the sample; at least one detector configured to detect at least one detected light beam outputted from the at least one collection optics; multiple polarizers that are configured to (a) set a polarization of the illumination light beam by selectively introducing, under a control of the control unit, at least one illumination optics polarization change, and (b) set a polarization of the at least one detected light beam by selectively introducing, under a control of the control unit, at least one collection optics polarization change. The multiple polarizers may include one or more illumination half-wave plates, one or more quarter-wave plates, and one or more inhomogeneous polarizers.