公开(公告)号：US20240386589A1

公开(公告)日：2024-11-21

申请号：US18198768

申请日：2023-05-17

Applicant: Applied Materials Israel Ltd.

Inventor： Mor Baram ,  Gadi Oron ,  Shmuel Mizrachi ,  David Uliel ,  Ifat Neuberger ,  Eyal Angel

IPC: G06T7/55 ,  G06T3/60 ,  G06T7/12 ,  G06T7/60 ,  H01J37/244 ,  H01J37/26

Abstract: An electron beam spot shape reconstruction unit that includes a processing circuit and a memory unit. The processing circuit is configured to reconstruct a shape of an electron beam spot by (i) obtaining multiple groups of images of circular targets of a sample, wherein different groups of images of the multiple groups of images are associated with different polar angles; (ii) processing at least two of the multiple groups of images to determine first-axis edge width information and second-axis edge width information; and (iii) reconstructing the electron beam spot shape based on the first-axis edge width information and second-axis edge width information.