公开(公告)号：US20160349742A1

公开(公告)日：2016-12-01

申请号：US14727800

申请日：2015-06-01

Applicant: Applied Materials Israel Ltd.

Inventor： Michele DALLA-TORRE ,  Amit BATIKOFF ,  Efrat ROZENMAN ,  Ron KATZIR ,  Imry KISSOS

IPC: G05B19/418

Abstract: There are provided a method of generating an inspection recipe usable for inspecting an inspection area of a specimen and a recipe generating unit. The recipe generating unit is configured: upon obtaining design data informative of design structural elements comprised in a design PoI corresponding to the at least one PoI, to provide global segmentation of a test image captured by an inspection tool unit from the inspection area and comprising at least one test PoI of substantially the same design as the at least one PoI, thereby to obtain segmented structural elements comprised in the test PoI and segmentation configuration data; to associate the segmented structural elements comprised in the test PoI with the design structural elements comprised in the design PoI, thereby to obtain design association data; and to generate an inspection recipe comprising, at least, segmentation configuration data and design association data.

Abstract translation: 提供了一种生成可用于检查样本和食谱生成单元的检查区域的检查配方的方法。 配方生成单元被配置为：在获得包括在与至少一个PoI对应的设计PoI中的设计结构元素的设计数据时，提供由检查工具单元从检查区域捕获的测试图像的全局分割，并且包括 至少一个测试PoI与至少一个PoI基本上相同的设计，从而获得包含在测试PoI和分割配置数据中的分段结构元素; 将包含在测试PoI中的分段结构元素与设计PoI中包含的设计结构元素相关联，从而获得设计关联数据; 并且生成至少包括分割配置数据和设计关联数据的检查配方。

公开(公告)号：US20160350905A1

公开(公告)日：2016-12-01

申请号：US14728495

申请日：2015-06-02

Applicant: Applied Materials Israel Ltd.

Inventor： Michele DALLA-TORRE ,  Amit BATIKOFF ,  Efrat ROZENMAN ,  Ron KATZIR ,  Imry KISSOS

IPC: G06T7/00 ,  G06K9/62

CPC classification number: G05B19/41875 ,  G05B2219/37224 ,  G05B2219/45031 ,  G06K9/6202 ,  G06T7/0004 ,  G06T7/001 ,  G06T2200/24 ,  G06T2207/30148 ,  Y02P90/265

Abstract: There are provided a method of inspecting the inspection area and an inspection system thereof. The inspection system comprises an inspection control unit operatively coupled to an inspection tool unit and to a recipe generating unit. The inspection control unit is configured to obtain the design data and the inspection recipe; to provide local segmentation of at least one inspection PoI comprised in an inspection image captured from the inspection area by the inspection tool unit, thereby obtaining inspection structural elements comprised in the at least one inspection PoI, the local segmentation is provided using segmentation configuration data specified in the inspection recipe; to identify one or more target structural elements and design structural elements corresponding thereto, identifying is provided using design association data specified in the inspection recipe; and to enable metrology measurements for the one or more target structural elements using the identified design structural elements.

Abstract translation: 提供检查检查区域的方法及其检查系统。 检查系统包括可操作地联接到检查工具单元和配方生成单元的检查控制单元。 检查控制单元被配置为获得设计数据和检查配方; 提供包括在由检查工具单元从检查区域捕获的检查图像中的至少一个检查PoI的局部分割，从而获得包括在至少一个检查PoI中的检查结构元件，使用指定的分割配置数据提供局部分割 在检验配方中; 识别一个或多个目标结构元件并设计与之对应的结构元件，使用在检查配方中指定的设计关联数据来提供识别; 并且使用所识别的设计结构元件来对一个或多个目标结构元件进行度量测量。