公开(公告)号：US20200372631A1

公开(公告)日：2020-11-26

申请号：US16993869

申请日：2020-08-14

Applicant: Applied Materials Israel, Ltd.

Inventor： Assaf ASBAG ,  Orly ZVITIA ,  Idan KAIZERMAN ,  Efrat ROSENMAN

IPC: G06T7/00 ,  G06K9/62

Abstract: There are provided system and method of classifying defects in a specimen. The method includes: obtaining one or more defect clusters detected on a defect map of the specimen, each cluster characterized by a set of cluster attributes comprising spatial attributes including spatial density indicative of density of defects in one or more regions accommodating the cluster, each given defect cluster being detected at least based on the spatial density thereof meeting a criterion. The defect map also comprises non-clustered defects. Defects of interest (DOI) are identified in each cluster by performing respective defect filtrations for each cluster and non-clustered defects.

公开(公告)号：US20160189055A1

公开(公告)日：2016-06-30

申请号：US14588101

申请日：2014-12-31

Applicant: Applied Materials Israel Ltd.

Inventor： Orly ZVITIA

IPC: G06N99/00

Abstract: A method, system and computer software product for tuning a classification system. The tuning method receives training data including items, each associated with a training class label, and obtains test data including association of each item with an automatic class label and corresponding values of a first confidence level and a second confidence level. Per automatic class, the method generates two or more performance metrics based on the training data and the test data. The method selects, for each automatic class, a preferred pair of values of the first confidence threshold and the second confidence threshold for which, by rejecting all items bellow the first and second thresholds, with respect to all of the automatic classes, a global optimum condition of the performance metrics is met.

Abstract translation: 一种用于调整分类系统的方法，系统和计算机软件产品。 调整方法接收训练数据，包括每个与训练类标签相关联的项目，并且获得测试数据，包括每个项目与自动分类标签的关联以及第一置信度和第二置信水平的对应值。 根据自动类，该方法基于训练数据和测试数据生成两个或多个性能度量。 该方法为每个自动类别选择第一置信度阈值和第二置信阈值的优选对值，通过拒绝相对于所有自动类别的第一和第二阈值的所有项目，全局最优 性能指标的条件得到满足。

公开(公告)号：US20190333208A1

公开(公告)日：2019-10-31

申请号：US15962909

申请日：2018-04-25

Applicant: Applied Materials Israel, Ltd.

Inventor： Assaf ASBAG ,  Orly ZVITIA ,  Idan KAIZERMAN ,  Efrat ROSENMAN

IPC: G06T7/00 ,  G06K9/62

Abstract: There are provided system and method of classifying defects in a specimen. The method includes: obtaining one or more defect clusters detected on a defect map of the specimen, each cluster characterized by a set of cluster attributes comprising spatial attributes including spatial density indicative of density of defects in one or more regions accommodating the cluster, each given defect cluster being detected at least based on the spatial density thereof meeting a criterion; for each cluster, applying a cluster classifier to a respective set of cluster attributes thereof to associate the cluster with one or more labels of a predefined set of labels, wherein the cluster classifier is trained using cluster training data; and identifying DOI in each cluster by performing a defect filtration for each cluster using one or more filtering parameters specified in accordance with the label of the cluster.

公开(公告)号：US20160035076A1

公开(公告)日：2016-02-04

申请号：US14446295

申请日：2014-07-29

Applicant: Applied Materials Israel Ltd.

Inventor： Ishai SCHWARZBAND ,  Yan IVANCHENKO ,  Daniel RAVID ,  Orly ZVITIA ,  Idan KAIZERMAN

IPC: G06T7/00 ,  G06K9/62

CPC classification number: G06T7/001 ,  G06K9/4604 ,  G06K9/6211 ,  G06K2209/19 ,  G06K2209/403 ,  G06T2207/10028 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: A method for image processing includes providing a microscopic image of a structure fabricated on a substrate and computer-aided design (CAD) data used in fabricating the structure. The microscopic image is processed by a computer so as to generate a first directionality map, which includes, for a matrix of points in the microscopic image, respective directionality vectors corresponding to magnitudes and directions of edges at the points irrespective of a sign of the magnitudes. The CAD data are processed by the computer so as to produce a simulated image based on the CAD data and to generate a second directionality map based on the simulated image. The first and second directionality maps are compared by the computer so as to register the microscopic image with the CAD data.

Abstract translation: 一种用于图像处理的方法包括提供在基板上制造的结构的微观图像和用于制造该结构的计算机辅助设计（CAD）数据。 显微镜图像由计算机处理，以便产生第一方向性图，其包括对于微观图像中的点的矩阵，对应于点处的边缘的大小和方向的各个方向性矢量，而不管幅度的符号 。 CAD数据由计算机处理，以便根据CAD数据产生模拟图像，并且基于模拟图像产生第二方向性图。 通过计算机比较第一和第二方向性图，以便将CAD数据注册到微观图像。